Thermodynamic analysis on the codeposition of ZrC-SiC by chemical vapor deposition using the ZrCl₄-C₃H₆-MTS-H ₂-Ar system

A thermodynamic calculation on co-deposition of ZrC-SiC from the ZrCl ₄-C₃H₆-MTS-H₂-Ar system was performed using the FactSage thermochemical software and verification experiments were performed. The surface diagrams of condensed-phases in this system were expressed as functions of the deposition temperature, total pressure, reactant ratio of MTS/(MTS+C₃H₆) and ratio of H₂/(ZrCl₄+MTS+C₃H₆), and the composition of the products was determined by the diagram. The calculation results indicate that their yields strongly depend on the molar ratio of the injected reactants and temperature, and ZrC-SiC can be co-deposited under a proper condition. The experimental results show that ZrC-SiC coating was successfully co-deposited on graphite substrates and carbon fibers according to the thermodynamic calculation.