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Theoretical studies on the Si(001)-SiO2 interface structure

  • Ming Xiu Zhou
  • , Chun Yang
  • , Xiao Yan Deng
  • , Wei Fei Yu
  • , Jin Shan Li
  • Sichuan Normal University
  • China Academy of Engineering Physics

Research output: Contribution to journalArticlepeer-review

5 Scopus citations

Abstract

Novel models (2 × 1) of Si(001)-SiO2 interface structure have been established. The method of the first-principle General Gradient Approximation (GGA) is employed to structurally optimize the established theoretical models under the K-point space of periodic boundary condition. The structures after optimization have been analyzed, and the results show that the interfaces present in disordered state and both Si-O-Si and Si=O structures exist. Meanwhile, the bonding of surface structure is analyzed via the graphics of electron localization function (ELF).

Original languageEnglish
Pages (from-to)647-652
Number of pages6
JournalJiegou Huaxue
Volume25
Issue number6
StatePublished - 2006
Externally publishedYes

Keywords

  • DFT
  • Interface structure
  • Si/SiO

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