The system lever application of comb resonator macromodel

The system level simulation of macromodel makes great use of the advantage of system level and physical level of MEMS design , makes it convenient to exchange design information between two level, shorten the MEMS design period. The Comb resonator, which is in common use in MEMS area, has been chosen as an example to illuminate the use of macromodel in system level, and the base on reuse intellectual property (IP) method, VHDL-AMS language and Zeni VDE simulation bench are used to implement this method . With the time domain and frequency domain simulation, the precision of macromodel and the short time consumption of simulation are validated compare with the design desire and simulation result of ANSYS,a general FEA simulator.