The analysis of the self-oscillation system for resonant pressure sensor

Xiaodong Sun; Weizheng Yuan; Dayong Qiao; Sen Ren

doi:10.1007/s00542-016-2818-2

The analysis of the self-oscillation system for resonant pressure sensor

Xiaodong Sun
, Weizheng Yuan
, Dayong Qiao
, Sen Ren

School of Mechanical Engineering

Northwestern Polytechnical University Xian

Research output: Contribution to journal › Article › peer-review

4 Scopus citations

Abstract

In this paper a detailed analysis on the self-oscillation system that is used for the resonant pressure sensor is presented. The stability and transient response of the system are investigated through a theoretical model, which is verified by experiment. This analysis provides an approach to optimize the parameters of the control system to get a short settling time and a stable system in the full pressure scale. The sensor chip is fabricated using a commercially available silicon-on-insulator wafer. By optimizing the parameters, the self-oscillation system for the sensor works well and the setting time is less than 300 ms in full pressure scale. The calibration result shows that the resonant pressure sensor has a nonlinearity of 0.045 %FS, a hysteresis error of 0.14 %FS, and a repeatability error of 0.18 %FS.

Original language	English
Pages (from-to)	945-951
Number of pages	7
Journal	Microsystem Technologies
Volume	23
Issue number	4
DOIs	https://doi.org/10.1007/s00542-016-2818-2
State	Published - 1 Apr 2017

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@article{3124e42abb2a459899eb271badddb226,

title = "The analysis of the self-oscillation system for resonant pressure sensor",

abstract = "In this paper a detailed analysis on the self-oscillation system that is used for the resonant pressure sensor is presented. The stability and transient response of the system are investigated through a theoretical model, which is verified by experiment. This analysis provides an approach to optimize the parameters of the control system to get a short settling time and a stable system in the full pressure scale. The sensor chip is fabricated using a commercially available silicon-on-insulator wafer. By optimizing the parameters, the self-oscillation system for the sensor works well and the setting time is less than 300 ms in full pressure scale. The calibration result shows that the resonant pressure sensor has a nonlinearity of 0.045 \%FS, a hysteresis error of 0.14 \%FS, and a repeatability error of 0.18 \%FS.",

author = "Xiaodong Sun and Weizheng Yuan and Dayong Qiao and Sen Ren",

note = "Publisher Copyright: {\textcopyright} 2016, Springer-Verlag Berlin Heidelberg.",

year = "2017",

month = apr,

day = "1",

doi = "10.1007/s00542-016-2818-2",

language = "英语",

volume = "23",

pages = "945--951",

journal = "Microsystem Technologies",

issn = "0946-7076",

publisher = "Springer Science and Business Media Deutschland GmbH",

number = "4",

}

TY - JOUR

T1 - The analysis of the self-oscillation system for resonant pressure sensor

AU - Sun, Xiaodong

AU - Yuan, Weizheng

AU - Qiao, Dayong

AU - Ren, Sen

PY - 2017/4/1

Y1 - 2017/4/1

N2 - In this paper a detailed analysis on the self-oscillation system that is used for the resonant pressure sensor is presented. The stability and transient response of the system are investigated through a theoretical model, which is verified by experiment. This analysis provides an approach to optimize the parameters of the control system to get a short settling time and a stable system in the full pressure scale. The sensor chip is fabricated using a commercially available silicon-on-insulator wafer. By optimizing the parameters, the self-oscillation system for the sensor works well and the setting time is less than 300 ms in full pressure scale. The calibration result shows that the resonant pressure sensor has a nonlinearity of 0.045 %FS, a hysteresis error of 0.14 %FS, and a repeatability error of 0.18 %FS.

AB - In this paper a detailed analysis on the self-oscillation system that is used for the resonant pressure sensor is presented. The stability and transient response of the system are investigated through a theoretical model, which is verified by experiment. This analysis provides an approach to optimize the parameters of the control system to get a short settling time and a stable system in the full pressure scale. The sensor chip is fabricated using a commercially available silicon-on-insulator wafer. By optimizing the parameters, the self-oscillation system for the sensor works well and the setting time is less than 300 ms in full pressure scale. The calibration result shows that the resonant pressure sensor has a nonlinearity of 0.045 %FS, a hysteresis error of 0.14 %FS, and a repeatability error of 0.18 %FS.

UR - https://www.scopus.com/pages/publications/84955320166

U2 - 10.1007/s00542-016-2818-2

DO - 10.1007/s00542-016-2818-2

M3 - 文章

AN - SCOPUS:84955320166

SN - 0946-7076

VL - 23

SP - 945

EP - 951

JO - Microsystem Technologies

JF - Microsystem Technologies

IS - 4

ER -

The analysis of the self-oscillation system for resonant pressure sensor

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