@inproceedings{348b9bfd3d374e65a73ca41ecb6b310e,
title = "Temperature Effect on Self-Oscillation Thresholds in Thermal-Piezoresistive MEMS Resonators",
abstract = "This paper investigates the temperature dependence of the self-oscillation threshold current in a thermal-actuation and piezoresistive-detection resonator. Temperature-induced stress is shown to alter the device's resistance and thermal properties, which in turn govern the minimum power required for self-oscillation. The observed non-monotonic variation of the threshold current is attributed to the discrepancy between the temperature responses of the threshold power and the device resistance. The analysis of this phenomenon provides critical insights for the design of low-power and environmentally robust resonant sensors.",
keywords = "piezoresistive-detection, resonator, temperature dependence, thermal-actuation, threshold current",
author = "Haojie Li and Chenhao Yang and Geer Teng and Wei Zhang and Xiaoying Li and Hemin Zhang",
note = "Publisher Copyright: {\textcopyright} 2026 IEEE.; 21st IEEE International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2026 ; Conference date: 17-04-2026 Through 21-04-2026",
year = "2026",
doi = "10.1109/NEMS69704.2026.11633650",
language = "英语",
series = "2026 IEEE 21st International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2026",
publisher = "Institute of Electrical and Electronics Engineers Inc.",
pages = "244--247",
booktitle = "2026 IEEE 21st International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2026",
}