System-level modeling for MEMS optical components

To improve the accuracy and efficiency of the simulation for the optical system in a Micro-electro-mechanical System (MEMS) and to overcome the difficulties in the system-level modeling of MEMS optical components, a system-level modeling method was proposed to support the co-simulation for MEMS system-level mechanical components and electrical components. First, the modeling methodology of Multi-Port-Element Network (MuPEN), the characteristics of Gaussian beam and the theory of space coordinate transformation were introduced. Then, the modeling process of a micro-mirror was given to explain the modeling method of all optical components. Finally, using the hardware description language of Verilog-A, an optical library including some typical components was established. The non-differential voltage simulation results of the system-level scanning system were compared with those of Coventor Ware and results show that the scanning system in former environment can eliminate the blind area, and the maximum error is within 3%. It indicates that the proposed modeling method for optical components could work effectively and accurately, and the study is significant value to the MEMS system-level design.