Abstract
Nonlinear dynamic control equation of the diaphragm of micromachined capacitive microphone was constructed based on one-dimensional lumped parameter model. Parametric element was developed using hardware description language on commercial software Saber based on this equation. System level modeling and simulation can be realized by connecting the parametric element and the detection circuit under Saber modeling and simulation environment. Time domain, frequency domain simulation and the calculation of pull-in voltage, capacitance with different bias voltage were performed. At last, the simulation results were compared with the experimental results in literatures and FEA numerical results, and the validity of this method was proved.
| Original language | English |
|---|---|
| Pages (from-to) | 1518-1522 |
| Number of pages | 5 |
| Journal | Zhongguo Jixie Gongcheng/China Mechanical Engineering |
| Volume | 18 |
| Issue number | 13 |
| State | Published - 10 Jul 2007 |
Keywords
- Capacitive microphone
- MEMS
- Parametric element
- System level