Study on organic/inorganic hybrid organosilicon antireflective coatings by sol-gel technology

Hui Juan Liu; Ning Chen; Qing Hua Zhang; Bo Jiang

Study on organic/inorganic hybrid organosilicon antireflective coatings by sol-gel technology

Hui Juan Liu
, Ning Chen
, Qing Hua Zhang
, Bo Jiang

Sichuan University
Chengdu Fine Optical Engineering Research Center

Research output: Contribution to journal › Article › peer-review

Abstract

Monolayer high anti-reflective coatings are coated by sol-gel method with tetraethyl orthosilicate(TEOS) and silicon oil (MW≈500) as precursor and ammonia as catalyst. The performance is characterized by transmission electric microscopy (TEM), IR spectrum, ultraviolet-visible spectrophotometry, etc. The results show that the transmittance can be more than 99.5%, the surface is smooth, and hydrophobic performance is raised.

Original language	English
Pages (from-to)	308-310+314
Journal	Guangxue Jishu/Optical Technique
Volume	33
Issue number	2
State	Published - Mar 2007
Externally published	Yes

Keywords

Anti-reflective
Silicon oil
Sol-gel
Tetraethyl orthosilicate

Cite this

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title = "Study on organic/inorganic hybrid organosilicon antireflective coatings by sol-gel technology",

abstract = "Monolayer high anti-reflective coatings are coated by sol-gel method with tetraethyl orthosilicate(TEOS) and silicon oil (MW≈500) as precursor and ammonia as catalyst. The performance is characterized by transmission electric microscopy (TEM), IR spectrum, ultraviolet-visible spectrophotometry, etc. The results show that the transmittance can be more than 99.5\%, the surface is smooth, and hydrophobic performance is raised.",

keywords = "Anti-reflective, Silicon oil, Sol-gel, Tetraethyl orthosilicate",

author = "Liu, \{Hui Juan\} and Ning Chen and Zhang, \{Qing Hua\} and Bo Jiang",

year = "2007",

month = mar,

language = "英语",

volume = "33",

pages = "308--310+314",

journal = "Guangxue Jishu/Optical Technique",

issn = "1002-1582",

publisher = "Optical Technique",

number = "2",

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TY - JOUR

T1 - Study on organic/inorganic hybrid organosilicon antireflective coatings by sol-gel technology

AU - Liu, Hui Juan

AU - Chen, Ning

AU - Zhang, Qing Hua

AU - Jiang, Bo

PY - 2007/3

Y1 - 2007/3

N2 - Monolayer high anti-reflective coatings are coated by sol-gel method with tetraethyl orthosilicate(TEOS) and silicon oil (MW≈500) as precursor and ammonia as catalyst. The performance is characterized by transmission electric microscopy (TEM), IR spectrum, ultraviolet-visible spectrophotometry, etc. The results show that the transmittance can be more than 99.5%, the surface is smooth, and hydrophobic performance is raised.

AB - Monolayer high anti-reflective coatings are coated by sol-gel method with tetraethyl orthosilicate(TEOS) and silicon oil (MW≈500) as precursor and ammonia as catalyst. The performance is characterized by transmission electric microscopy (TEM), IR spectrum, ultraviolet-visible spectrophotometry, etc. The results show that the transmittance can be more than 99.5%, the surface is smooth, and hydrophobic performance is raised.

KW - Anti-reflective

KW - Silicon oil

KW - Sol-gel

KW - Tetraethyl orthosilicate

UR - https://www.scopus.com/pages/publications/34248199780

M3 - 文章

AN - SCOPUS:34248199780

SN - 1002-1582

VL - 33

SP - 308-310+314

JO - Guangxue Jishu/Optical Technique

JF - Guangxue Jishu/Optical Technique

IS - 2

ER -

Study on organic/inorganic hybrid organosilicon antireflective coatings by sol-gel technology

Abstract

Keywords

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