Study of nano-scaffold on improving gettering performance of Ti-Zr-V film and the influencing mechanism

In order to enhance the adsorption performance, a novel three-dimensional (3D) Ti-Zr-V thin film getter was developed by depositing Ti-Zr-V film on ZnO nanorod and nanotube arrays prepared through electrochemical deposition and chemical etching methods respectively. The composition, morphology, and adsorption performance of the 3D Ti-Zr-V thin film getter were investigated using energy dispersive spectroscopy, scanning electron microscopy, and hydrogen adsorption performance test. Compared with the two-dimensional planar Ti-Zr-V film, the 3D Ti-Zr-V film deposited on ZnO nanoarray exhibited significantly improved sorption rates (increased by 109.38 % for ZnO nanorod array and 212.50 % for ZnO nanotube array) as well as increased sorption capacities (enhanced by 89.93 % for ZnO nanorod array and 174.82 % for ZnO nanotube array). The enhanced adsorption performance can be attributed to both surface adsorption and gas diffusion in the nanoporous structures of the novel 3D Ti-Zr-V thin film getter.