Self-Sustained Resonant Accelerometer Based on Thermal-Actuation and Piezoresistive-Detection Mechanis

Yuxuan Cheng; Geer Teng; Zhenxing Liu; Chenhao Yang; Haojie Li; Langyue Nie; Chengxin Li; Honglong Chang; Hemin Zhang

doi:10.1109/MEMS64181.2026.11419498

Self-Sustained Resonant Accelerometer Based on Thermal-Actuation and Piezoresistive-Detection Mechanis

Yuxuan Cheng
, Geer Teng
, Zhenxing Liu
, Chenhao Yang
, Haojie Li
, Langyue Nie
, Chengxin Li
, Honglong Chang
, Hemin Zhang

School of Mechanical Engineering

Northwestern Polytechnical University Xian
KU Leuven

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › peer-review

Abstract

This paper presents the first self-sustained resonant accelerometer based on thermal-actuation and piezoresistive-detection resonators (TPR). A selfsustaining oscillation loop is physically established when the thermal energy from the bias current through the nanobeam compensates for vibration energy losses in the Double-ended tuning fork (DETF) resonators, eliminating the necessity of complex closed-loop control circuits. Experimental results demonstrate self-oscillation with a DC input current of 390 μ A. A sensitivity of 428 Hz/ g, and a bias instability of 36 μ g can be observed under the thermal-piezoresistive self-oscillation cases. This study opens up a new way for realizing resonant accelerometers with exceedingly simple control circuitry, low power consumption and comparable resolution.

Original language	English
Title of host publication	2026 IEEE 39th International Conference on Micro Electro Mechanical Systems, MEMS 2026
Publisher	Institute of Electrical and Electronics Engineers Inc.
Pages	1151-1154
Number of pages	4
ISBN (Electronic)	9798331572518
DOIs	https://doi.org/10.1109/MEMS64181.2026.11419498
State	Published - 2026
Event	39th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2026 - Salzburg, Austria Duration: 25 Jan 2026 → 29 Jan 2026

Publication series

Name	Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)
ISSN (Print)	1084-6999

Conference

Conference	39th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2026
Country/Territory	Austria
City	Salzburg
Period	25/01/26 → 29/01/26

Keywords

Self-sustaining oscillation
low power consumption
resonator accelerometer
thermal-actuation and piezoresistive-detection

Access to Document

10.1109/MEMS64181.2026.11419498

Cite this

Cheng, Y., Teng, G., Liu, Z., Yang, C., Li, H., Nie, L., Li, C., Chang, H., & Zhang, H. (2026). Self-Sustained Resonant Accelerometer Based on Thermal-Actuation and Piezoresistive-Detection Mechanis. In 2026 IEEE 39th International Conference on Micro Electro Mechanical Systems, MEMS 2026 (pp. 1151-1154). (Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)). Institute of Electrical and Electronics Engineers Inc.. https://doi.org/10.1109/MEMS64181.2026.11419498

Cheng, Yuxuan ; Teng, Geer ; Liu, Zhenxing et al. / Self-Sustained Resonant Accelerometer Based on Thermal-Actuation and Piezoresistive-Detection Mechanis. 2026 IEEE 39th International Conference on Micro Electro Mechanical Systems, MEMS 2026. Institute of Electrical and Electronics Engineers Inc., 2026. pp. 1151-1154 (Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)).

@inproceedings{e96eec09d92049b1b81efaa0837e7eca,

title = "Self-Sustained Resonant Accelerometer Based on Thermal-Actuation and Piezoresistive-Detection Mechanis",

abstract = "This paper presents the first self-sustained resonant accelerometer based on thermal-actuation and piezoresistive-detection resonators (TPR). A selfsustaining oscillation loop is physically established when the thermal energy from the bias current through the nanobeam compensates for vibration energy losses in the Double-ended tuning fork (DETF) resonators, eliminating the necessity of complex closed-loop control circuits. Experimental results demonstrate self-oscillation with a DC input current of 390 μ A. A sensitivity of 428 Hz/ g, and a bias instability of 36 μ g can be observed under the thermal-piezoresistive self-oscillation cases. This study opens up a new way for realizing resonant accelerometers with exceedingly simple control circuitry, low power consumption and comparable resolution.",

keywords = "Self-sustaining oscillation, low power consumption, resonator accelerometer, thermal-actuation and piezoresistive-detection",

author = "Yuxuan Cheng and Geer Teng and Zhenxing Liu and Chenhao Yang and Haojie Li and Langyue Nie and Chengxin Li and Honglong Chang and Hemin Zhang",

note = "Publisher Copyright: {\textcopyright} 2026 IEEE.; 39th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2026 ; Conference date: 25-01-2026 Through 29-01-2026",

year = "2026",

doi = "10.1109/MEMS64181.2026.11419498",

language = "英语",

series = "Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)",

publisher = "Institute of Electrical and Electronics Engineers Inc.",

pages = "1151--1154",

booktitle = "2026 IEEE 39th International Conference on Micro Electro Mechanical Systems, MEMS 2026",

}

Cheng, Y, Teng, G, Liu, Z, Yang, C, Li, H, Nie, L, Li, C, Chang, H & Zhang, H 2026, Self-Sustained Resonant Accelerometer Based on Thermal-Actuation and Piezoresistive-Detection Mechanis. in 2026 IEEE 39th International Conference on Micro Electro Mechanical Systems, MEMS 2026. Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS), Institute of Electrical and Electronics Engineers Inc., pp. 1151-1154, 39th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2026, Salzburg, Austria, 25/01/26. https://doi.org/10.1109/MEMS64181.2026.11419498

Self-Sustained Resonant Accelerometer Based on Thermal-Actuation and Piezoresistive-Detection Mechanis. / Cheng, Yuxuan; Teng, Geer; Liu, Zhenxing et al.
2026 IEEE 39th International Conference on Micro Electro Mechanical Systems, MEMS 2026. Institute of Electrical and Electronics Engineers Inc., 2026. p. 1151-1154 (Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)).

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › peer-review

TY - GEN

T1 - Self-Sustained Resonant Accelerometer Based on Thermal-Actuation and Piezoresistive-Detection Mechanis

AU - Cheng, Yuxuan

AU - Teng, Geer

AU - Liu, Zhenxing

AU - Yang, Chenhao

AU - Li, Haojie

AU - Nie, Langyue

AU - Li, Chengxin

AU - Chang, Honglong

AU - Zhang, Hemin

PY - 2026

Y1 - 2026

N2 - This paper presents the first self-sustained resonant accelerometer based on thermal-actuation and piezoresistive-detection resonators (TPR). A selfsustaining oscillation loop is physically established when the thermal energy from the bias current through the nanobeam compensates for vibration energy losses in the Double-ended tuning fork (DETF) resonators, eliminating the necessity of complex closed-loop control circuits. Experimental results demonstrate self-oscillation with a DC input current of 390 μ A. A sensitivity of 428 Hz/ g, and a bias instability of 36 μ g can be observed under the thermal-piezoresistive self-oscillation cases. This study opens up a new way for realizing resonant accelerometers with exceedingly simple control circuitry, low power consumption and comparable resolution.

AB - This paper presents the first self-sustained resonant accelerometer based on thermal-actuation and piezoresistive-detection resonators (TPR). A selfsustaining oscillation loop is physically established when the thermal energy from the bias current through the nanobeam compensates for vibration energy losses in the Double-ended tuning fork (DETF) resonators, eliminating the necessity of complex closed-loop control circuits. Experimental results demonstrate self-oscillation with a DC input current of 390 μ A. A sensitivity of 428 Hz/ g, and a bias instability of 36 μ g can be observed under the thermal-piezoresistive self-oscillation cases. This study opens up a new way for realizing resonant accelerometers with exceedingly simple control circuitry, low power consumption and comparable resolution.

KW - Self-sustaining oscillation

KW - low power consumption

KW - resonator accelerometer

KW - thermal-actuation and piezoresistive-detection

UR - https://www.scopus.com/pages/publications/105041740016

U2 - 10.1109/MEMS64181.2026.11419498

DO - 10.1109/MEMS64181.2026.11419498

M3 - 会议稿件

AN - SCOPUS:105041740016

T3 - Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)

SP - 1151

EP - 1154

BT - 2026 IEEE 39th International Conference on Micro Electro Mechanical Systems, MEMS 2026

PB - Institute of Electrical and Electronics Engineers Inc.

T2 - 39th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2026

Y2 - 25 January 2026 through 29 January 2026

ER -

Cheng Y, Teng G, Liu Z, Yang C, Li H, Nie L et al. Self-Sustained Resonant Accelerometer Based on Thermal-Actuation and Piezoresistive-Detection Mechanis. In 2026 IEEE 39th International Conference on Micro Electro Mechanical Systems, MEMS 2026. Institute of Electrical and Electronics Engineers Inc. 2026. p. 1151-1154. (Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)). doi: 10.1109/MEMS64181.2026.11419498

Self-Sustained Resonant Accelerometer Based on Thermal-Actuation and Piezoresistive-Detection Mechanis

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Keywords

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