@inbook{9ec21060c0ad4a6cbfdab5bf44bae969,
title = "Self-Powered and Soft Polymer MEMS/NEMS Devices",
author = "Kottapalli, {Ajay Giri Prakash} and Kai Tao and Debarun Sengupta and Triantafyllou, {Michael S.}",
year = "2019",
doi = "10.1007/978-3-030-05554-7",
language = "英语",
series = "SpringerBriefs in Applied Sciences and Technology: Nanotheranostics",
publisher = "Springer Science and Business Media Deutschland GmbH",
pages = "1--85",
booktitle = "SpringerBriefs in Applied Sciences and Technology",
}