Properties of ultrafine SnOx thin film made by plasma polymerization

Yong Zhang; Kun Lin Zhou; Wei Min Cao; Wei Min Liu

Properties of ultrafine SnOx thin film made by plasma polymerization

Yong Zhang
, Kun Lin Zhou
, Wei Min Cao
, Wei Min Liu

Research output: Contribution to journal › Article › peer-review

Abstract

Ultrafine SnOx thin films were prepared from tetrabutyltin by RF glow discharge polymerization. Annealing behaviour of films under air and gas-sensitive property were investigated. The ultrafine SnOx thin film with average particle size of 6nm exhibited a high sensitivity of 30 to 500ppm EtOH at 200°C.

Original language	English
Pages (from-to)	493-494
Number of pages	2
Journal	Chinese Chemical Letters
Volume	7
Issue number	5
State	Published - 1996
Externally published	Yes

Cite this

@article{4e2cd16dccdb44c8a3ff14e1095b5c86,

title = "Properties of ultrafine SnOx thin film made by plasma polymerization",

abstract = "Ultrafine SnOx thin films were prepared from tetrabutyltin by RF glow discharge polymerization. Annealing behaviour of films under air and gas-sensitive property were investigated. The ultrafine SnOx thin film with average particle size of 6nm exhibited a high sensitivity of 30 to 500ppm EtOH at 200°C.",

author = "Yong Zhang and Zhou, \{Kun Lin\} and Cao, \{Wei Min\} and Liu, \{Wei Min\}",

year = "1996",

language = "英语",

volume = "7",

pages = "493--494",

journal = "Chinese Chemical Letters",

issn = "1001-8417",

publisher = "Elsevier B.V.",

number = "5",

}

TY - JOUR

T1 - Properties of ultrafine SnOx thin film made by plasma polymerization

AU - Zhang, Yong

AU - Zhou, Kun Lin

AU - Cao, Wei Min

AU - Liu, Wei Min

PY - 1996

Y1 - 1996

N2 - Ultrafine SnOx thin films were prepared from tetrabutyltin by RF glow discharge polymerization. Annealing behaviour of films under air and gas-sensitive property were investigated. The ultrafine SnOx thin film with average particle size of 6nm exhibited a high sensitivity of 30 to 500ppm EtOH at 200°C.

AB - Ultrafine SnOx thin films were prepared from tetrabutyltin by RF glow discharge polymerization. Annealing behaviour of films under air and gas-sensitive property were investigated. The ultrafine SnOx thin film with average particle size of 6nm exhibited a high sensitivity of 30 to 500ppm EtOH at 200°C.

UR - https://www.scopus.com/pages/publications/3142567291

M3 - 文章

AN - SCOPUS:3142567291

SN - 1001-8417

VL - 7

SP - 493

EP - 494

JO - Chinese Chemical Letters

JF - Chinese Chemical Letters

IS - 5

ER -

Properties of ultrafine SnOx thin film made by plasma polymerization

Abstract

Other files and links

Fingerprint

Cite this