Preparation and comparision of two typical CVD films from CH4 and C3H6 as carbon resources

W. B. Yang, L. T. Zhang, L. F. Cheng, Y. S. Liu, W. H. Zhang

Research output: Chapter in Book/Report/Conference proceedingConference contributionpeer-review

Abstract

Two boron-carbon coatings were prepared by CVD from BC13-CH 4-H2-Ar and BCl3-C3H 6-H2-Ar precursors with same depositing temperature and total pressure. Microstructure and composition of the prepared coatings were compared by SEM, XRD, and XPS. It was found that the coatings derived from C3H6 and CH4 are both hybrid with different microstructure and composition. The coating derived from C3H6 mainly consists of boron doped graphite which decides this coating showing a relatively smooth surface morphology and a finely laminated fracture structure while the coating derived from CH4 consists dominantly of B 51.02C1.82 crystals. The main composition of B 51.02C1.82 shows a distinct crystal orientation surface morphology and a randomly oriented lamellar structure.

Original languageEnglish
Title of host publicationCeramic Materials and Components for Energy and Environmental Applications - 9th Int. Symp. on Ceramic Materials for Energy and Environmental Applications and the 4th Laser Ceramics Symp.
PublisherAmerican Ceramic Society
Pages47-54
Number of pages8
ISBN (Print)9780470408421
DOIs
StatePublished - 2010
EventCeramic Materials and Components for Energy and Environmental Applications - 9th International Symposium on Ceramic Materials for Energy and Environmental Applications and the 4th Laser Ceramics Symposium - Shanghai, China
Duration: 10 Nov 200814 Nov 2008

Publication series

NameCeramic Transactions
Volume210
ISSN (Print)1042-1122

Conference

ConferenceCeramic Materials and Components for Energy and Environmental Applications - 9th International Symposium on Ceramic Materials for Energy and Environmental Applications and the 4th Laser Ceramics Symposium
Country/TerritoryChina
CityShanghai
Period10/11/0814/11/08

Keywords

  • Bonding states
  • Boron-carbon material
  • CVD
  • Microstructure
  • XPS

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