@inproceedings{d2d9cee9aff4472ca1ba45a17fbf921f,
title = "Preparation and comparision of two typical CVD films from CH4 and C3H6 as carbon resources",
abstract = "Two boron-carbon coatings were prepared by CVD from BC13-CH 4-H2-Ar and BCl3-C3H 6-H2-Ar precursors with same depositing temperature and total pressure. Microstructure and composition of the prepared coatings were compared by SEM, XRD, and XPS. It was found that the coatings derived from C3H6 and CH4 are both hybrid with different microstructure and composition. The coating derived from C3H6 mainly consists of boron doped graphite which decides this coating showing a relatively smooth surface morphology and a finely laminated fracture structure while the coating derived from CH4 consists dominantly of B 51.02C1.82 crystals. The main composition of B 51.02C1.82 shows a distinct crystal orientation surface morphology and a randomly oriented lamellar structure.",
keywords = "Bonding states, Boron-carbon material, CVD, Microstructure, XPS",
author = "Yang, {W. B.} and Zhang, {L. T.} and Cheng, {L. F.} and Liu, {Y. S.} and Zhang, {W. H.}",
year = "2010",
doi = "10.1002/9780470640845.ch7",
language = "英语",
isbn = "9780470408421",
series = "Ceramic Transactions",
publisher = "American Ceramic Society",
pages = "47--54",
booktitle = "Ceramic Materials and Components for Energy and Environmental Applications - 9th Int. Symp. on Ceramic Materials for Energy and Environmental Applications and the 4th Laser Ceramics Symp.",
note = "Ceramic Materials and Components for Energy and Environmental Applications - 9th International Symposium on Ceramic Materials for Energy and Environmental Applications and the 4th Laser Ceramics Symposium ; Conference date: 10-11-2008 Through 14-11-2008",
}