Polarization-Dependent Anisotropy of LIPSSs’ Morphology Evolution on a Single-Crystal Silicon Surface

Utilizing the principle of laser-induced periodic surface structures (LIPSSs), this research delves into the morphological evolution of single-crystal silicon surfaces irradiated by a near-infrared picosecond laser through a scanning mode. With the increase in laser energy density, the nanostructure morphology on single-crystal silicon surfaces induced by incident lasers with different polarization directions sequentially produces high spatial-frequency LIPSSs (HSFLs) with a period of 220 nm ± 10 nm parallel to the laser polarization, low spatial-frequency LIPSSs (LSFLs) with a period of 770 nm ± 85 nm perpendicular to the direction of the polarization, and groove structures. Furthermore, by varying the angle between the laser polarization and the scanning direction, the study examined the combined anisotropic effects of the laser polarization scanning direction angle and the laser polarization crystal orientation angle on the genesis of LIPSSs on single-crystal silicon (100) surfaces. The experiments revealed polarization-related anisotropic characteristics in the morphology of HSFLs. It was found that when the polarization angle approached 45°, the regularity of the LSFLs deteriorated, the modification width decreased, and the periodicity increased. This is critical for the precise control of the LSFLs’ morphology.