TY - JOUR
T1 - PBGFMEA
T2 - A Belief Jensen–Shannon Theory and Gray Relational Projection-Based Enhanced FMEA Approach for Risk Evaluation of Integrated Circuit Process
AU - Diao, Yue
AU - Chen, Kaiyu
AU - Gao, Hanmei
AU - Wang, Xuanlin
AU - Wang, Yucheng
AU - Li, Wei
AU - Wang, Shaoxi
N1 - Publisher Copyright:
© ASM International 2025.
PY - 2025
Y1 - 2025
N2 - Failure mode and effects analysis (FMEA) is a crucial risk assessment method widely used in the design of industrial products. However, a key challenge remains in handling the uncertainty and conflicts that arise from subjective evaluations. To address this, this paper introduces an enhanced FMEA model, termed PBGFMEA, which integrates Belief Jensen–Shannon theory and the Gray Relational Projection Method (GRPM). Belief Jensen–Shannon theory is utilized to quantify the discrepancies between Basic Probability Assignments (BPAs), effectively managing conflicting assessments in FMEA. To combine expert evaluations, Dempster’s combination rule is applied, generating a unified risk factor value. The resulting BPA fusion is then transformed into a probability distribution using an improved pignistic probability function. GRPM is employed to rank the risk priorities of failure modes, overcoming the issue in traditional FMEA where different failure modes might share the same risk priority. An application to integrated circuit manufacturing processes is provided, demonstrating the proposed method’s reliability and efficiency.
AB - Failure mode and effects analysis (FMEA) is a crucial risk assessment method widely used in the design of industrial products. However, a key challenge remains in handling the uncertainty and conflicts that arise from subjective evaluations. To address this, this paper introduces an enhanced FMEA model, termed PBGFMEA, which integrates Belief Jensen–Shannon theory and the Gray Relational Projection Method (GRPM). Belief Jensen–Shannon theory is utilized to quantify the discrepancies between Basic Probability Assignments (BPAs), effectively managing conflicting assessments in FMEA. To combine expert evaluations, Dempster’s combination rule is applied, generating a unified risk factor value. The resulting BPA fusion is then transformed into a probability distribution using an improved pignistic probability function. GRPM is employed to rank the risk priorities of failure modes, overcoming the issue in traditional FMEA where different failure modes might share the same risk priority. An application to integrated circuit manufacturing processes is provided, demonstrating the proposed method’s reliability and efficiency.
KW - D-S evidence theory
KW - FMEA
KW - Gray relational projection
KW - Integrated circuit process
KW - Reliable evaluation
UR - http://www.scopus.com/inward/record.url?scp=105008544365&partnerID=8YFLogxK
U2 - 10.1007/s11668-025-02199-3
DO - 10.1007/s11668-025-02199-3
M3 - 文章
AN - SCOPUS:105008544365
SN - 1547-7029
JO - Journal of Failure Analysis and Prevention
JF - Journal of Failure Analysis and Prevention
ER -