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New reaction pathways of propene + BCl 3 decomposition in chemical vapor deposition process

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Abstract

More reaction pathways in the CVD process of preparing boron-carbides with BCl 3-C 3H 6(propene)-H 2 precursors were examined in addition to the "lowest" path proposed by Jiang et al. in Theor Chem Acc 127:519538, 2010. The new pathways investigated in this work involve 81 new transition states and 79 new intermediates. Geometries of the species were optimized with the density functional theory at B3PW91/6-311G(d,p) level. Intrinsic reaction coordinates were analyzed to confirm the correct reaction linkages. Energy barriers and reaction energies were calculated with the accurate model chemistry method G3(MP2) after a non-dynamical electronic correlation detection using CASSCF method. Heat capacities and entropies were obtained with the statistical thermodynamics and fitted as a function of temperature. Gibbs free energies at 298.15 K and 1200 K were used to examine the reaction paths. It was found that some steps in the new paths at both 298.15 K and 1200 K are different from the "lowest" path obtained previously and the pathways for the new products CB and C 2B were obtained.

Original languageEnglish
Pages (from-to)53-85
Number of pages33
JournalJournal of Theoretical and Computational Chemistry
Volume11
Issue number1
DOIs
StatePublished - Feb 2012

Keywords

  • chemical vapor deposition
  • new reaction pathways
  • Propene and boron trichloride

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