Microstructure evolution and mechanical properties of refractory high-entropy alloy nitride film

The (TiZrNbMo)Nx refractory high-entropy alloys (RHEAs) nitride films were fabricated using reactive magnetron sputtering by modifying the N₂ flow rate ratio in the mixed N₂ + Ar atmosphere. The incorporation of the N element induced a phase transition in the (TiZrNbMo)Nx films from body-centered cubic (BCC) to face-centered cubic (FCC) structure, accompanied by increasing in the amorphous phase. With the introduction of N₂, the hardness of (TiZrNbMo)Nx films firstly increased significantly to 25.2 GPa when the N₂ flow rate ratio was at 50 % and then decreased slightly to 18.5 GPa when the N₂ flow rate ratio was at 75 %. Theoretical analysis shows that the doping of N element enhances the solid strengthening effect, with the formation of nitride phases and grain boundary (GB) strengthening effect significantly contributing to the enhanced hardness. Furthermore, the addition of N element can also inhibit grain rotation and GB sliding during deformation. This work provides a new insight into understanding the structure and properties of refractory high-entropy alloy films.