Microstructure and properties of porous si3N4 Ceramics with a dense surface

Xiangming Li, Xiaowei Yin, Litong Zhang, Tianhao Pan

Research output: Contribution to journalArticlepeer-review

35 Scopus citations

Abstract

Porous Si3N4 ceramics with a dense surface are fabricated by a joint process of pressureless sintering and chemical vapor deposition (CVD). Before CVD, the Si3N4 ceramic shows a uniform microstructure with well-distributed pores. During CVD, the depositions of Si3N4 in the inner surface and on the external surface of the ceramics lead to a decrease of porosities and pore sizes. As a result, both the flexural strength and fracture toughness of the Si3N 4 ceramic increase by >30%, the surface hardness increases more than five times, and the dielectric constant and loss increase slightly.

Original languageEnglish
Pages (from-to)627-636
Number of pages10
JournalInternational Journal of Applied Ceramic Technology
Volume8
Issue number3
DOIs
StatePublished - May 2011

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