Microstructure and Formation Mechanisms of Nanowires and Nanoplates ZrO₂ during the ZrB₂ Deposition Process

Preparation of boride by chemical vapor deposition (CVD) is sensitive to oxygen, subtle changes in oxygen concentration during the deposition of ZrB₂ can induce the formation of Zirconium dioxide (ZrO₂) with a novel nanoplate-stacked structure and nanowire structure. The ZrO₂ nanostructure changed with - oxygen concentration. Nanowires with uniform size of 50-100 nm in diameter and over 100 μm in length were obtained at high oxygen concentration, while highly-ordered nanoplate arrays were obtained at low oxygen concentration. Both of these nanostructures were grown in situ on the surface of ZrB₂-coating. In this paper, the preparation method of novelty ZrO₂ nano-structures grown in situ was provided, the morphologies and compositions of the nanostructural ZrO₂ were characterized and the formation mechanism was proposed, which also provides experimental basis for the industrial morphology control of ZrB₂ deposited by CVD method.