MEMS 集成设计与制造技术进展

Chip technology has become a bottleneck restricting the development of high-quality in China, and the high-performance micro-sensor chip based on micro-electro-mechanical system (MEMS) technology is one of the bottlenecks devices in Europe and America. "If you want to do something good, you must first improve your tool", similar to microelectronics chips, design and manufacturing technology is also the key to restricting the performance of MEMS chips. Firstly, starting from MEMS design methods and tools, reviews the development process of MEMS design methods from structured design methods of fixed processes to pan-structured design methods of arbitrary processes, introduces the advantages of arbitrary process design methods, introduces the mainstream commercial MEMS design tools in the world, and compares the advantages and disadvantages of typical design tools. Secondly, the characteristics and challenges of MEMS manufacturing technology are introduced, and several typical customized manufacturing technologies in the world and the single mask and selective release manufacturing methods proposed by Northwestern Polytechnical University are emphatically analyzed. Then the advantages of batch manufacturing technology are analyzed and the common batch foundry methods and typical batch foundry processes in China are given. Finally, the necessity of high-end MEMS design and manufacturing integration is pointed out, in order to provide reference for the development of China's MEMS mass manufacturing.