MEMS陀螺工作原理及其性能提升方法

The micro-electro-mechanical system(MEMS) gyroscope represents a new type of multi-functional micro-inertial sensor enabling angular velocity measurements with characteristics of high precision, small size and robustness to external interference, which finds extensive utilization across various domains, including aerospace, platform drilling, autonomous driving, wearable devices and smart phones. In recent years, with the continuous research on MEMS gyroscope, many new operation modes have been proposed, whereas their performance often varies greatly due to the different measurement principles. This paper aims to solve the problem of lack of systematic review of the operation modes of MEMS gyroscope. According to the readout technology, the operation modes of MEMS gyroscope are classified into amplitude modulated (AM), whole-angle (WA) and frequency modulated (FM) gyroscopes. Based on the systematic introduction of their working principles, the performance improvement methods of MEMS gyroscopes in various operating modes are discussed in detail. Finally, the development trend of various types of MEMS gyroscopes is also introduced to meet the growing demand for MEMS gyroscopes, and the development of MEMS gyroscopes with the combination of the characteristics of the modes is prospected.