Measurement of maximum blazed angle and optimization analysis for a micro programmable blazed grating

As an important optical performance, the maximum blazed angle decides the applicable spectrum band for the micro programmable grating. For achieving the maximum blazed angle of the fabricated micro programmable grating, two experimental measuring methods were proposed, and a simple optical system was set up for verifying their feasibility and efficiency. The measured results agree well with both the theoretical computation and numerical simulation, and the relative errors are less than 3.5%. In addition, according to the experimental phenomenon, a simulation with Matlab software was performed to analyze the influence of release holes on the diffraction pattern. It offers a technical reference for improving the optical performance of the micro programmable grating.