@inproceedings{f6db3ef58c9844859059f7146734e0d8,
title = "Low noise vacuum MEMS closed-loop accelerometer using sixth-order multi-feedback loops and local resonator sigma delta modulator",
abstract = "This paper reports on the design, implementation of a novel sixth-order sigma-delta modulator (ΣΔΜ) MEMS closed-loop accelerometer with extended bandwidth in a vacuum environment (∼0.5Torr), which can coexist on a single die (or package) with other sensors requiring vacuum packaging. The fully differential accelerometer sensing element with a large proof mass (4×7mm2) was designed and fabricated on a Silicon-on-Insulator (SOI) wafer with 50μm-thick structural layer. Four electronic integrators were cascaded with the sensing element for high-order noise shaping ability. The local feedback paths created a local resonator producing a notch to further suppress the total in-band quantization noise. Measurement results show the overall noise floor achieved was-120dBg/√Hz, which is equivalent to a noise acceleration value of 1.2μg/√Hz in a 500Hz bandwidth; the scale factor was 950mV/g for input accelerations up to ±6g.",
author = "Fang Chen and Weizheng Yuan and Honglong Chang and Ioannis Zeimpekis and Michael Kraft",
year = "2014",
doi = "10.1109/MEMSYS.2014.6765752",
language = "英语",
isbn = "9781479935086",
series = "Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)",
publisher = "Institute of Electrical and Electronics Engineers Inc.",
pages = "761--764",
booktitle = "MEMS 2014 - 27th IEEE International Conference on Micro Electro Mechanical Systems",
note = "27th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2014 ; Conference date: 26-01-2014 Through 30-01-2014",
}