Low noise vacuum MEMS closed-loop accelerometer using sixth-order multi-feedback loops and local resonator sigma delta modulator

Fang Chen, Weizheng Yuan, Honglong Chang, Ioannis Zeimpekis, Michael Kraft

Research output: Chapter in Book/Report/Conference proceedingConference contributionpeer-review

24 Scopus citations

Abstract

This paper reports on the design, implementation of a novel sixth-order sigma-delta modulator (ΣΔΜ) MEMS closed-loop accelerometer with extended bandwidth in a vacuum environment (∼0.5Torr), which can coexist on a single die (or package) with other sensors requiring vacuum packaging. The fully differential accelerometer sensing element with a large proof mass (4×7mm2) was designed and fabricated on a Silicon-on-Insulator (SOI) wafer with 50μm-thick structural layer. Four electronic integrators were cascaded with the sensing element for high-order noise shaping ability. The local feedback paths created a local resonator producing a notch to further suppress the total in-band quantization noise. Measurement results show the overall noise floor achieved was-120dBg/√Hz, which is equivalent to a noise acceleration value of 1.2μg/√Hz in a 500Hz bandwidth; the scale factor was 950mV/g for input accelerations up to ±6g.

Original languageEnglish
Title of host publicationMEMS 2014 - 27th IEEE International Conference on Micro Electro Mechanical Systems
PublisherInstitute of Electrical and Electronics Engineers Inc.
Pages761-764
Number of pages4
ISBN (Print)9781479935086
DOIs
StatePublished - 2014
Event27th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2014 - San Francisco, CA, United States
Duration: 26 Jan 201430 Jan 2014

Publication series

NameProceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)
ISSN (Print)1084-6999

Conference

Conference27th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2014
Country/TerritoryUnited States
CitySan Francisco, CA
Period26/01/1430/01/14

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