TY - GEN
T1 - Low noise vacuum MEMS closed-loop accelerometer using sixth-order multi-feedback loops and local resonator sigma delta modulator
AU - Chen, Fang
AU - Yuan, Weizheng
AU - Chang, Honglong
AU - Zeimpekis, Ioannis
AU - Kraft, Michael
PY - 2014
Y1 - 2014
N2 - This paper reports on the design, implementation of a novel sixth-order sigma-delta modulator (ΣΔΜ) MEMS closed-loop accelerometer with extended bandwidth in a vacuum environment (∼0.5Torr), which can coexist on a single die (or package) with other sensors requiring vacuum packaging. The fully differential accelerometer sensing element with a large proof mass (4×7mm2) was designed and fabricated on a Silicon-on-Insulator (SOI) wafer with 50μm-thick structural layer. Four electronic integrators were cascaded with the sensing element for high-order noise shaping ability. The local feedback paths created a local resonator producing a notch to further suppress the total in-band quantization noise. Measurement results show the overall noise floor achieved was-120dBg/√Hz, which is equivalent to a noise acceleration value of 1.2μg/√Hz in a 500Hz bandwidth; the scale factor was 950mV/g for input accelerations up to ±6g.
AB - This paper reports on the design, implementation of a novel sixth-order sigma-delta modulator (ΣΔΜ) MEMS closed-loop accelerometer with extended bandwidth in a vacuum environment (∼0.5Torr), which can coexist on a single die (or package) with other sensors requiring vacuum packaging. The fully differential accelerometer sensing element with a large proof mass (4×7mm2) was designed and fabricated on a Silicon-on-Insulator (SOI) wafer with 50μm-thick structural layer. Four electronic integrators were cascaded with the sensing element for high-order noise shaping ability. The local feedback paths created a local resonator producing a notch to further suppress the total in-band quantization noise. Measurement results show the overall noise floor achieved was-120dBg/√Hz, which is equivalent to a noise acceleration value of 1.2μg/√Hz in a 500Hz bandwidth; the scale factor was 950mV/g for input accelerations up to ±6g.
UR - http://www.scopus.com/inward/record.url?scp=84898974793&partnerID=8YFLogxK
U2 - 10.1109/MEMSYS.2014.6765752
DO - 10.1109/MEMSYS.2014.6765752
M3 - 会议稿件
AN - SCOPUS:84898974793
SN - 9781479935086
T3 - Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)
SP - 761
EP - 764
BT - MEMS 2014 - 27th IEEE International Conference on Micro Electro Mechanical Systems
PB - Institute of Electrical and Electronics Engineers Inc.
T2 - 27th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2014
Y2 - 26 January 2014 through 30 January 2014
ER -