Low-loss tantalum pentoxide photonics based on Damascene process

Ruixuan Yi; Jinlong Lu; Xiaotong Zhang; Xuetao Gan

Low-loss tantalum pentoxide photonics based on Damascene process

Ruixuan Yi
, Jinlong Lu
, Xiaotong Zhang
, Xuetao Gan

School of Microelectronics

Northwestern Polytechnical University Xian

Research output: Contribution to conference › Paper › peer-review

Abstract

We demonstrate a low-loss Ta₂O₅ photonic platform using the Damascene process, presenting microring resonators with an intrinsic Q factor of 1.1 million and a waveguide propagation loss of 0.34 dB/cm.

Original language	English
State	Published - 2024
Event	2024 Conference on Lasers and Electro-Optics/Pacific Rim, CLEO-PR 2024 - Incheon, Korea, Republic of Duration: 4 Aug 2024 → 8 Aug 2024

Conference

Conference	2024 Conference on Lasers and Electro-Optics/Pacific Rim, CLEO-PR 2024
Country/Territory	Korea, Republic of
City	Incheon
Period	4/08/24 → 8/08/24

Cite this

@conference{31ac61fc7f004a5ea24980d46822b849,

title = "Low-loss tantalum pentoxide photonics based on Damascene process",

abstract = "We demonstrate a low-loss Ta2O5 photonic platform using the Damascene process, presenting microring resonators with an intrinsic Q factor of 1.1 million and a waveguide propagation loss of 0.34 dB/cm.",

author = "Ruixuan Yi and Jinlong Lu and Xiaotong Zhang and Xuetao Gan",

note = "Publisher Copyright: {\textcopyright} 2024 The Author(s); 2024 Conference on Lasers and Electro-Optics/Pacific Rim, CLEO-PR 2024 ; Conference date: 04-08-2024 Through 08-08-2024",

year = "2024",

language = "英语",

}

TY - CONF

T1 - Low-loss tantalum pentoxide photonics based on Damascene process

AU - Yi, Ruixuan

AU - Lu, Jinlong

AU - Zhang, Xiaotong

AU - Gan, Xuetao

PY - 2024

Y1 - 2024

N2 - We demonstrate a low-loss Ta2O5 photonic platform using the Damascene process, presenting microring resonators with an intrinsic Q factor of 1.1 million and a waveguide propagation loss of 0.34 dB/cm.

AB - We demonstrate a low-loss Ta2O5 photonic platform using the Damascene process, presenting microring resonators with an intrinsic Q factor of 1.1 million and a waveguide propagation loss of 0.34 dB/cm.

UR - https://www.scopus.com/pages/publications/85216230255

M3 - 论文

AN - SCOPUS:85216230255

T2 - 2024 Conference on Lasers and Electro-Optics/Pacific Rim, CLEO-PR 2024

Y2 - 4 August 2024 through 8 August 2024

ER -

Low-loss tantalum pentoxide photonics based on Damascene process

Abstract

Conference

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