Layout extraction and system-level modeling automatically for MEMS device

A methodology extracting information from the layout of MEMS device in process-level for construction of the system-level model has been studied, which firstly geometric and topological information of components from the standard layout file were extracted, then these information were transferred and mapped with the MEMS parameterized component library in system-level, Finally, the system-level model of the device based on Saber™ simulator was constructed according to the topology of the original layout, in this way, the data transfer from the process level to the system level is realized, the transfer interface was developed in C++. We validated the feasibility of the transferring method by two kinds of typical MEMS devices-microaccelerator and micromirror.