Key algorithm for MEMS process geometrical simulation based on ACIS

Jing Hui Xu; Wei Zheng Yuan; Hong Long Chang; Jian Bing Xie

Key algorithm for MEMS process geometrical simulation based on ACIS

Jing Hui Xu
, Wei Zheng Yuan
, Hong Long Chang
, Jian Bing Xie

School of Mechanical Engineering

Northwestern Polytechnical University Xian

Research output: Contribution to journal › Article › peer-review

Abstract

An algorithm is explored to MEMS process geometrical simulation by setting 3D models' top surface solids and heights, which can give a good resolution of definition for the relative position among 3D models carried out in MEMS process geometrical simulation. The algorithm is well realized in MEMS process geometrical simulation and indicates that the speed of simulation is much higher than that in systems available now.

Original language	English
Pages (from-to)	96-99
Number of pages	4
Journal	Yadian Yu Shengguang/Piezoelectrics and Acoustooptics
Volume	29
Issue number	1
State	Published - Feb 2007

Keywords

ACIS
Algorithm
Geometrical simulation
MEMS

Cite this

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title = "Key algorithm for MEMS process geometrical simulation based on ACIS",

abstract = "An algorithm is explored to MEMS process geometrical simulation by setting 3D models' top surface solids and heights, which can give a good resolution of definition for the relative position among 3D models carried out in MEMS process geometrical simulation. The algorithm is well realized in MEMS process geometrical simulation and indicates that the speed of simulation is much higher than that in systems available now.",

keywords = "ACIS, Algorithm, Geometrical simulation, MEMS",

author = "Xu, \{Jing Hui\} and Yuan, \{Wei Zheng\} and Chang, \{Hong Long\} and Xie, \{Jian Bing\}",

year = "2007",

month = feb,

language = "英语",

volume = "29",

pages = "96--99",

journal = "Yadian Yu Shengguang/Piezoelectrics and Acoustooptics",

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AU - Xu, Jing Hui

AU - Yuan, Wei Zheng

AU - Chang, Hong Long

AU - Xie, Jian Bing

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Y1 - 2007/2

N2 - An algorithm is explored to MEMS process geometrical simulation by setting 3D models' top surface solids and heights, which can give a good resolution of definition for the relative position among 3D models carried out in MEMS process geometrical simulation. The algorithm is well realized in MEMS process geometrical simulation and indicates that the speed of simulation is much higher than that in systems available now.

AB - An algorithm is explored to MEMS process geometrical simulation by setting 3D models' top surface solids and heights, which can give a good resolution of definition for the relative position among 3D models carried out in MEMS process geometrical simulation. The algorithm is well realized in MEMS process geometrical simulation and indicates that the speed of simulation is much higher than that in systems available now.

KW - ACIS

KW - Algorithm

KW - Geometrical simulation

KW - MEMS

UR - https://www.scopus.com/pages/publications/34047199443

M3 - 文章

AN - SCOPUS:34047199443

SN - 1004-2474

VL - 29

SP - 96

EP - 99

JO - Yadian Yu Shengguang/Piezoelectrics and Acoustooptics

JF - Yadian Yu Shengguang/Piezoelectrics and Acoustooptics

IS - 1

ER -

Key algorithm for MEMS process geometrical simulation based on ACIS

Abstract

Keywords

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