Indium tin oxide thin-film thermocouple probe based on sapphire microrod

Jinjun Deng; Linwei Zhang; Liuan Hui; Xinhang Jin; Binghe Ma

doi:10.3390/s20051289

Indium tin oxide thin-film thermocouple probe based on sapphire microrod

Jinjun Deng
, Linwei Zhang
, Liuan Hui
, Xinhang Jin
, Binghe Ma

School of Microelectronics

Northwestern Polytechnical University Xian

Research output: Contribution to journal › Article › peer-review

25 Scopus citations

Abstract

Indium tin oxide (ITO) thin-film thermocouples monitor the temperature of hot section components in gas turbines. As an in situ measuring technology, the main challenge of a thin-film thermocouple is its installation on complex geometric surfaces. In this study, an ITO thin-film thermocouple probe based on a sapphire microrod was used to access narrow areas. The performance of the probe, i.e., the thermoelectricity and stability, was analyzed. This novel sensor resolves the installation difficulties of thin-film devices.

Original language	English
Article number	1289
Journal	Sensors
Volume	20
Issue number	5
DOIs	https://doi.org/10.3390/s20051289
State	Published - 1 Mar 2020

Keywords

Indium tin oxide
Sapphire cylinder
Sputtering
Thin-film thermocouple

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10.3390/s20051289

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title = "Indium tin oxide thin-film thermocouple probe based on sapphire microrod",

abstract = "Indium tin oxide (ITO) thin-film thermocouples monitor the temperature of hot section components in gas turbines. As an in situ measuring technology, the main challenge of a thin-film thermocouple is its installation on complex geometric surfaces. In this study, an ITO thin-film thermocouple probe based on a sapphire microrod was used to access narrow areas. The performance of the probe, i.e., the thermoelectricity and stability, was analyzed. This novel sensor resolves the installation difficulties of thin-film devices.",

keywords = "Indium tin oxide, Sapphire cylinder, Sputtering, Thin-film thermocouple",

author = "Jinjun Deng and Linwei Zhang and Liuan Hui and Xinhang Jin and Binghe Ma",

note = "Publisher Copyright: {\textcopyright} 2020 by the authors. Licensee MDPI, Basel, Switzerland.",

year = "2020",

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doi = "10.3390/s20051289",

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volume = "20",

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T1 - Indium tin oxide thin-film thermocouple probe based on sapphire microrod

AU - Deng, Jinjun

AU - Zhang, Linwei

AU - Hui, Liuan

AU - Jin, Xinhang

AU - Ma, Binghe

PY - 2020/3/1

Y1 - 2020/3/1

N2 - Indium tin oxide (ITO) thin-film thermocouples monitor the temperature of hot section components in gas turbines. As an in situ measuring technology, the main challenge of a thin-film thermocouple is its installation on complex geometric surfaces. In this study, an ITO thin-film thermocouple probe based on a sapphire microrod was used to access narrow areas. The performance of the probe, i.e., the thermoelectricity and stability, was analyzed. This novel sensor resolves the installation difficulties of thin-film devices.

AB - Indium tin oxide (ITO) thin-film thermocouples monitor the temperature of hot section components in gas turbines. As an in situ measuring technology, the main challenge of a thin-film thermocouple is its installation on complex geometric surfaces. In this study, an ITO thin-film thermocouple probe based on a sapphire microrod was used to access narrow areas. The performance of the probe, i.e., the thermoelectricity and stability, was analyzed. This novel sensor resolves the installation difficulties of thin-film devices.

KW - Indium tin oxide

KW - Sapphire cylinder

KW - Sputtering

KW - Thin-film thermocouple

UR - https://www.scopus.com/pages/publications/85080994174

U2 - 10.3390/s20051289

DO - 10.3390/s20051289

M3 - 文章

C2 - 32120933

AN - SCOPUS:85080994174

SN - 1424-8220

VL - 20

JO - Sensors

JF - Sensors

IS - 5

M1 - 1289

ER -

Indium tin oxide thin-film thermocouple probe based on sapphire microrod

Abstract

Keywords

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