Implementation of audio acquisition system for designed MEMS array thruster

Based on micro-electro-mechanical system (MEMS) technology, micro array thruster was designed and ignition process was recorded by audio acquisition system. Metal sputtering and dry etching process were utilized to form igniter and combustion chamber, respectively. The integrated ignition resister, wires and pads were fabricated. A reliable silicon-glass anodic bonding between combustion chamber and igniter was then formed. Silicon microphone was utilized to capture audio signal produced during propellant combustion. Test results show that size of MEMS array thruster is 8.8 mm×8.8 mm and 5 V DC low voltage meets ignition demands. Ignition power is estimated to be 900 mW. Captured audio data show that ignition process lasts about 40 μs. The audio system, as the payload of pico satellite, meets demand of flight.