Hybrid Passive-Active Nonlinearity Compensation for Mode-Localized Coupled Resonators

Weakly coupled resonators leveraging the mode localization effect offer exceptional parametric sensitivity, but their performance is severely degraded by Duffing hardening nonlinearity under large-amplitude oscillations. In this paper, the Harmonic Balance Method (HBM) is employed to quantitatively reveal the "sensitivity dilution"mechanism and the resulting linear dynamic range compression in coupled resonators. To address these challenges, a collaborative passive-active compensation method is proposed. A truss-like hollowed-out structure is designed to passively weaken the geometric nonlinearity of the resonator, combined with active electrostatic softening to precisely cancel the residual components. Simulation results confirm that this approach successfully corrects the backbone curves of the resonant system to a vertical state, significantly broadening the linear operating range while preserving ultra-high sensitivity.