Flexible capacitive pressure sensor based on interdigital electrodes with porous microneedle arrays for physiological signal monitoring

Jiahui Xu; Minghao Wang; Minyi Jin; Siyan Shang; Chuner Ni; Yili Hu; Xun Sun; Jun Xu; Bowen Ji; Le Li; Yuhua Cheng; Gaofeng Wang

doi:10.1063/10.0022174

Flexible capacitive pressure sensor based on interdigital electrodes with porous microneedle arrays for physiological signal monitoring

Jiahui Xu, Minghao Wang, Minyi Jin, Siyan Shang, Chuner Ni, Yili Hu, Xun Sun, Jun Xu, Bowen Ji, Le Li, Yuhua Cheng, Gaofeng Wang

Research output: Contribution to journal › Article › peer-review

8 Scopus citations

Abstract

ARTICLE HIGHLIGHTS HIGHLIGHTS • An interdigital electrode structure composed of two porous microneedle arrays greatly increases the sensitivity of the pressure sensor. • The pressure sensor has good stability over 1500 cycles due to the bilayer parylene-enhanced porous microneedle array electrode structure. • The pressure sensor can accurately monitor the movements of body parts and has a certain ability to recognize speech.

Original language	English
Article number	013003
Journal	Nami Jishu yu Jingmi Gongcheng/Nanotechnology and Precision Engineering
Volume	7
Issue number	1
DOIs	https://doi.org/10.1063/10.0022174
State	Published - 1 Mar 2024

Keywords

Capacitive pressure sensor
Interdigital electrode
Microneedle array
Porous PDMS

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10.1063/10.0022174

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Xu, J., Wang, M., Jin, M., Shang, S., Ni, C., Hu, Y., Sun, X., Xu, J., Ji, B., Li, L., Cheng, Y., & Wang, G. (2024). Flexible capacitive pressure sensor based on interdigital electrodes with porous microneedle arrays for physiological signal monitoring. Nami Jishu yu Jingmi Gongcheng/Nanotechnology and Precision Engineering, 7(1), Article 013003. https://doi.org/10.1063/10.0022174

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abstract = "ARTICLE HIGHLIGHTS HIGHLIGHTS • An interdigital electrode structure composed of two porous microneedle arrays greatly increases the sensitivity of the pressure sensor. • The pressure sensor has good stability over 1500 cycles due to the bilayer parylene-enhanced porous microneedle array electrode structure. • The pressure sensor can accurately monitor the movements of body parts and has a certain ability to recognize speech.",

keywords = "Capacitive pressure sensor, Interdigital electrode, Microneedle array, Porous PDMS",

author = "Jiahui Xu and Minghao Wang and Minyi Jin and Siyan Shang and Chuner Ni and Yili Hu and Xun Sun and Jun Xu and Bowen Ji and Le Li and Yuhua Cheng and Gaofeng Wang",

note = "Publisher Copyright: {\textcopyright} 2023 2023 Author(s).",

year = "2024",

month = mar,

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doi = "10.1063/10.0022174",

language = "英语",

volume = "7",

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Xu, J, Wang, M, Jin, M, Shang, S, Ni, C, Hu, Y, Sun, X, Xu, J, Ji, B , Li, L, Cheng, Y & Wang, G 2024, 'Flexible capacitive pressure sensor based on interdigital electrodes with porous microneedle arrays for physiological signal monitoring', Nami Jishu yu Jingmi Gongcheng/Nanotechnology and Precision Engineering, vol. 7, no. 1, 013003. https://doi.org/10.1063/10.0022174

TY - JOUR

T1 - Flexible capacitive pressure sensor based on interdigital electrodes with porous microneedle arrays for physiological signal monitoring

AU - Xu, Jiahui

AU - Wang, Minghao

AU - Jin, Minyi

AU - Shang, Siyan

AU - Ni, Chuner

AU - Hu, Yili

AU - Sun, Xun

AU - Xu, Jun

AU - Ji, Bowen

AU - Li, Le

AU - Cheng, Yuhua

AU - Wang, Gaofeng

PY - 2024/3/1

Y1 - 2024/3/1

N2 - ARTICLE HIGHLIGHTS HIGHLIGHTS • An interdigital electrode structure composed of two porous microneedle arrays greatly increases the sensitivity of the pressure sensor. • The pressure sensor has good stability over 1500 cycles due to the bilayer parylene-enhanced porous microneedle array electrode structure. • The pressure sensor can accurately monitor the movements of body parts and has a certain ability to recognize speech.

AB - ARTICLE HIGHLIGHTS HIGHLIGHTS • An interdigital electrode structure composed of two porous microneedle arrays greatly increases the sensitivity of the pressure sensor. • The pressure sensor has good stability over 1500 cycles due to the bilayer parylene-enhanced porous microneedle array electrode structure. • The pressure sensor can accurately monitor the movements of body parts and has a certain ability to recognize speech.

KW - Capacitive pressure sensor

KW - Interdigital electrode

KW - Microneedle array

KW - Porous PDMS

UR - http://www.scopus.com/inward/record.url?scp=85177826368&partnerID=8YFLogxK

U2 - 10.1063/10.0022174

DO - 10.1063/10.0022174

M3 - 文章

AN - SCOPUS:85177826368

SN - 1672-6030

VL - 7

JO - Nami Jishu yu Jingmi Gongcheng/Nanotechnology and Precision Engineering

JF - Nami Jishu yu Jingmi Gongcheng/Nanotechnology and Precision Engineering

IS - 1

M1 - 013003

ER -

Flexible capacitive pressure sensor based on interdigital electrodes with porous microneedle arrays for physiological signal monitoring

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