Fabrication and characteration of NiCr-NiSi thin film thermocouples on CFCC-SiC substrate

Xulun Ma; Weizheng Yuan; Binghe Ma; Jinjun Deng

doi:10.3969/j.issn.1004-1699.2014.03.005

Fabrication and characteration of NiCr-NiSi thin film thermocouples on CFCC-SiC substrate

Xulun Ma, Weizheng Yuan, Binghe Ma, Jinjun Deng

Northwestern Polytechnical University Xian

Research output: Contribution to journal › Article › peer-review

2 Scopus citations

Abstract

NiCr/NiSi thin film thermocouples were fabricated on the surface of carbon fiber reinforced silicon carbide ceramic composites (CFCC-SiC). Structure of the sensor from bottom to top is sequentially CFCC-SiC ceramic substrate, SiO₂ buffer layer, Al₂O₃ insulated layer and NiCr/NiSi thin film thermocouple layer. The static calibration result of the thin film thermocouples shows that the sensor has a stable thermal electromotive force output from 300°C to 700°C. The average Seebeck coefficient of the sensor is about 41.71 μV/°C, and its ultimate-use temperature is about 750°C.

Original language	English
Pages (from-to)	304-307
Number of pages	4
Journal	Chinese Journal of Sensors and Actuators
Volume	27
Issue number	3
DOIs	https://doi.org/10.3969/j.issn.1004-1699.2014.03.005
State	Published - Mar 2014

Keywords

Ceramic composites
Seebeck coefficient
Static calibration
Thin-film thermocouples
Ultimate-use temperature

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10.3969/j.issn.1004-1699.2014.03.005

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title = "Fabrication and characteration of NiCr-NiSi thin film thermocouples on CFCC-SiC substrate",

abstract = "NiCr/NiSi thin film thermocouples were fabricated on the surface of carbon fiber reinforced silicon carbide ceramic composites (CFCC-SiC). Structure of the sensor from bottom to top is sequentially CFCC-SiC ceramic substrate, SiO2 buffer layer, Al2O3 insulated layer and NiCr/NiSi thin film thermocouple layer. The static calibration result of the thin film thermocouples shows that the sensor has a stable thermal electromotive force output from 300°C to 700°C. The average Seebeck coefficient of the sensor is about 41.71 μV/°C, and its ultimate-use temperature is about 750°C.",

keywords = "Ceramic composites, Seebeck coefficient, Static calibration, Thin-film thermocouples, Ultimate-use temperature",

author = "Xulun Ma and Weizheng Yuan and Binghe Ma and Jinjun Deng",

year = "2014",

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doi = "10.3969/j.issn.1004-1699.2014.03.005",

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TY - JOUR

T1 - Fabrication and characteration of NiCr-NiSi thin film thermocouples on CFCC-SiC substrate

AU - Ma, Xulun

AU - Yuan, Weizheng

AU - Ma, Binghe

AU - Deng, Jinjun

PY - 2014/3

Y1 - 2014/3

N2 - NiCr/NiSi thin film thermocouples were fabricated on the surface of carbon fiber reinforced silicon carbide ceramic composites (CFCC-SiC). Structure of the sensor from bottom to top is sequentially CFCC-SiC ceramic substrate, SiO2 buffer layer, Al2O3 insulated layer and NiCr/NiSi thin film thermocouple layer. The static calibration result of the thin film thermocouples shows that the sensor has a stable thermal electromotive force output from 300°C to 700°C. The average Seebeck coefficient of the sensor is about 41.71 μV/°C, and its ultimate-use temperature is about 750°C.

AB - NiCr/NiSi thin film thermocouples were fabricated on the surface of carbon fiber reinforced silicon carbide ceramic composites (CFCC-SiC). Structure of the sensor from bottom to top is sequentially CFCC-SiC ceramic substrate, SiO2 buffer layer, Al2O3 insulated layer and NiCr/NiSi thin film thermocouple layer. The static calibration result of the thin film thermocouples shows that the sensor has a stable thermal electromotive force output from 300°C to 700°C. The average Seebeck coefficient of the sensor is about 41.71 μV/°C, and its ultimate-use temperature is about 750°C.

KW - Ceramic composites

KW - Seebeck coefficient

KW - Static calibration

KW - Thin-film thermocouples

KW - Ultimate-use temperature

UR - https://www.scopus.com/pages/publications/84900504460

U2 - 10.3969/j.issn.1004-1699.2014.03.005

DO - 10.3969/j.issn.1004-1699.2014.03.005

M3 - 文章

AN - SCOPUS:84900504460

SN - 1004-1699

VL - 27

SP - 304

EP - 307

JO - Chinese Journal of Sensors and Actuators

JF - Chinese Journal of Sensors and Actuators

IS - 3

ER -

Fabrication and characteration of NiCr-NiSi thin film thermocouples on CFCC-SiC substrate

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