Abstract
AlxOy films coated on both Ni-based superalloy and silica substrates were prepared by DC reactive magnetron sputtering. Post-deposition annealing was carried out on those as-deposited films. And then 1 h heat treatments were done on the annealed films at constant temperatures ranging from 600-900°C to simulate the high-temperature application. The AlxOy film heated at 600°C exhibited good film property. Bonding strength between the 600°C-heated AlxOy film and the Ni-based substrate was about 11.6 MPa.
| Original language | English |
|---|---|
| Article number | 1550016 |
| Journal | Surface Review and Letters |
| Volume | 22 |
| Issue number | 1 |
| DOIs | |
| State | Published - 25 Feb 2015 |
Keywords
- Aluminum oxide film
- Ni-based superalloy
- bonding strength
- heat treatments
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