Dielectric properties of La/Mn codoped Ba0.63Sr 0.37TiO3 thin films prepared by RF magnetron sputtering

Lirong Song; Ying Chen; Genshui Wang; Lihui Yang; Tao Li; Feng Gao; Xianlin Dong

doi:10.1016/j.ceramint.2014.04.039

Dielectric properties of La/Mn codoped Ba_0.63Sr _0.37TiO₃ thin films prepared by RF magnetron sputtering

Lirong Song
, Ying Chen
, Genshui Wang
, Lihui Yang
, Tao Li
, Feng Gao
, Xianlin Dong

CAS - Shanghai Institute of Ceramics

Research output: Contribution to journal › Article › peer-review

19 Scopus citations

Abstract

La/Mn codoped Ba_0.63Sr_0.37TiO₃ (BST) films were grown on LaNiO₃-coated Si substrates via RF magnetron sputtering. We also fabricated pure BST and La-doped BST films for comparison. Results show that moderate La/Mn codoping improves dielectric tunability (59.6%) as compared to pure BST (28.2%) at 700 kV/cm, and yields lower dielectric loss (tanδ=0.0170) and higher figure of merit (FOM=35.06) comparing with La-doped BST (tanδ=0.0242, FOM=26.32). This work demonstrated that La/Mn codoping could be an effective method to obtain high tunability and low loss tangent.

Original language	English
Pages (from-to)	12573-12577
Number of pages	5
Journal	Ceramics International
Volume	40
Issue number	8 PART A
DOIs	https://doi.org/10.1016/j.ceramint.2014.04.039
State	Published - Sep 2014
Externally published	Yes

Keywords

Barium strontium titanate
Dielectric properties
La/Mn codoping
Thin films

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10.1016/j.ceramint.2014.04.039

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@article{1bee659a58a74cebb41ad67de8542309,

title = "Dielectric properties of La/Mn codoped Ba0.63Sr 0.37TiO3 thin films prepared by RF magnetron sputtering",

abstract = "La/Mn codoped Ba0.63Sr0.37TiO3 (BST) films were grown on LaNiO3-coated Si substrates via RF magnetron sputtering. We also fabricated pure BST and La-doped BST films for comparison. Results show that moderate La/Mn codoping improves dielectric tunability (59.6\%) as compared to pure BST (28.2\%) at 700 kV/cm, and yields lower dielectric loss (tanδ=0.0170) and higher figure of merit (FOM=35.06) comparing with La-doped BST (tanδ=0.0242, FOM=26.32). This work demonstrated that La/Mn codoping could be an effective method to obtain high tunability and low loss tangent.",

keywords = "Barium strontium titanate, Dielectric properties, La/Mn codoping, Thin films",

author = "Lirong Song and Ying Chen and Genshui Wang and Lihui Yang and Tao Li and Feng Gao and Xianlin Dong",

year = "2014",

month = sep,

doi = "10.1016/j.ceramint.2014.04.039",

language = "英语",

volume = "40",

pages = "12573--12577",

journal = "Ceramics International",

issn = "0272-8842",

publisher = "Elsevier Ltd",

number = "8 PART A",

}

TY - JOUR

T1 - Dielectric properties of La/Mn codoped Ba0.63Sr 0.37TiO3 thin films prepared by RF magnetron sputtering

AU - Song, Lirong

AU - Chen, Ying

AU - Wang, Genshui

AU - Yang, Lihui

AU - Li, Tao

AU - Gao, Feng

AU - Dong, Xianlin

PY - 2014/9

Y1 - 2014/9

N2 - La/Mn codoped Ba0.63Sr0.37TiO3 (BST) films were grown on LaNiO3-coated Si substrates via RF magnetron sputtering. We also fabricated pure BST and La-doped BST films for comparison. Results show that moderate La/Mn codoping improves dielectric tunability (59.6%) as compared to pure BST (28.2%) at 700 kV/cm, and yields lower dielectric loss (tanδ=0.0170) and higher figure of merit (FOM=35.06) comparing with La-doped BST (tanδ=0.0242, FOM=26.32). This work demonstrated that La/Mn codoping could be an effective method to obtain high tunability and low loss tangent.

AB - La/Mn codoped Ba0.63Sr0.37TiO3 (BST) films were grown on LaNiO3-coated Si substrates via RF magnetron sputtering. We also fabricated pure BST and La-doped BST films for comparison. Results show that moderate La/Mn codoping improves dielectric tunability (59.6%) as compared to pure BST (28.2%) at 700 kV/cm, and yields lower dielectric loss (tanδ=0.0170) and higher figure of merit (FOM=35.06) comparing with La-doped BST (tanδ=0.0242, FOM=26.32). This work demonstrated that La/Mn codoping could be an effective method to obtain high tunability and low loss tangent.

KW - Barium strontium titanate

KW - Dielectric properties

KW - La/Mn codoping

KW - Thin films

UR - https://www.scopus.com/pages/publications/84903826842

U2 - 10.1016/j.ceramint.2014.04.039

DO - 10.1016/j.ceramint.2014.04.039

M3 - 文章

AN - SCOPUS:84903826842

SN - 0272-8842

VL - 40

SP - 12573

EP - 12577

JO - Ceramics International

JF - Ceramics International

IS - 8 PART A

ER -

Dielectric properties of La/Mn codoped Ba_0.63Sr _0.37TiO₃ thin films prepared by RF magnetron sputtering

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Keywords

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