Development and application of high-end aerospace MEMS

Weizheng Yuan

doi:10.1007/s11465-017-0424-3

Development and application of high-end aerospace MEMS

Weizheng Yuan

School of Mechanical Engineering

Ministry of Education of the People's Republic of China
Key Laboratory of Micro/Nano Electromechanical Systems

Research output: Contribution to journal › Review article › peer-review

13 Scopus citations

Abstract

This paper introduces the design and manufacturing technology of aerospace microelectromechanical systems (MEMS) characterized by high performance, multi-variety, and small batch. Moreover, several kinds of special MEMS devices with high precision, high reliability, and environmental adaptability, as well as their typical applications in the fields of aeronautics and aerospace, are presented.

Original language	English
Pages (from-to)	567-573
Number of pages	7
Journal	Frontiers of Mechanical Engineering
Volume	12
Issue number	4
DOIs	https://doi.org/10.1007/s11465-017-0424-3
State	Published - 1 Dec 2017

Keywords

aeronautic and aerospace
design and manufacture technology
MEMS

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10.1007/s11465-017-0424-3

Cite this

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title = "Development and application of high-end aerospace MEMS",

abstract = "This paper introduces the design and manufacturing technology of aerospace microelectromechanical systems (MEMS) characterized by high performance, multi-variety, and small batch. Moreover, several kinds of special MEMS devices with high precision, high reliability, and environmental adaptability, as well as their typical applications in the fields of aeronautics and aerospace, are presented.",

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AU - Yuan, Weizheng

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AB - This paper introduces the design and manufacturing technology of aerospace microelectromechanical systems (MEMS) characterized by high performance, multi-variety, and small batch. Moreover, several kinds of special MEMS devices with high precision, high reliability, and environmental adaptability, as well as their typical applications in the fields of aeronautics and aerospace, are presented.

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KW - design and manufacture technology

KW - MEMS

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DO - 10.1007/s11465-017-0424-3

M3 - 文献综述

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Development and application of high-end aerospace MEMS

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