Designing the sensing structure of a certain micro piezoresistive pressure sensor

In the design of an application-oriented sensing structure of a certain micro piezoresistive pressure sensor, we encountered some technical difficulties, whose solution can not, to our knowledge, be found in the open literature. In section 2 of the full paper, we design the typical structure of an elastic diaphragm. In section 3, we design the piezoresistor and determine its dimensions. In section 4, we use the ANSYS software to analyze the distribution of the stress and that of the strain of the elastic diaphragm under pressure and determine the optimal key location of the piezoresistor. The analysis shows that the closer to the edge of the diaphragm is the piezoresistor, the more sensitive it is. We also calculate its output voltages under different pressure loads and at different positions and obtain its natural frequency and response time. The response time curve, given in Fig. 7, shows preliminarily that the response speed of out micro piezoresistive pressure sensor is fast and stabilizes at 1.0 × 10^-5 second.