Design and fabrication of a flat plate radioisotope micro battery for MEMS

Channels array and inverted pyramid array Radioisotope Micro Battery suffer from difficulty to fabricating and non-uniform of the radioactive film. In order to solve these defects, a novel simple flat plate energy conversion device is designed. The metallic section is introduced to enhance the reliability of the radioactive film with the silicon base. In ourexperimentsof63Ni electric plating, a group of anticipant data of short-circuit current and open-circuit voltage were obtained. The results shows that compared to the conventional devices, the flat plat energy conversion device can offer amore reliable power output.