Design and fabrication of a flat plate radioisotope micro battery for MEMS

Peng Dong, Wei Zheng Yuan, Da Yong Qiao

Research output: Contribution to journalArticlepeer-review

Abstract

Channels array and inverted pyramid array Radioisotope Micro Battery suffer from difficulty to fabricating and non-uniform of the radioactive film. In order to solve these defects, a novel simple flat plate energy conversion device is designed. The metallic section is introduced to enhance the reliability of the radioactive film with the silicon base. In ourexperimentsof63Ni electric plating, a group of anticipant data of short-circuit current and open-circuit voltage were obtained. The results shows that compared to the conventional devices, the flat plat energy conversion device can offer amore reliable power output.

Original languageEnglish
Pages (from-to)319-322
Number of pages4
JournalGongneng Cailiao yu Qijian Xuebao/Journal of Functional Materials and Devices
Volume14
Issue number2
StatePublished - Apr 2008

Keywords

  • Ni radioisotope micro battery
  • Flat plate energy conversion device
  • Lift-off
  • Microelectro Mechanical Systems
  • Source activity

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