TY - JOUR
T1 - Dependence of film texture on substrate and growth conditions for CdTe films deposited by close-spaced sublimation
AU - Gao, Junning
AU - Jie, Wanqi
AU - Yuan, Yanyan
AU - Wang, Tao
AU - Zha, Gangqiang
AU - Tong, Junli
PY - 2011/9
Y1 - 2011/9
N2 - The texture of CdTe films deposited via close-spaced sublimation (CSS) was studied. Different substrates were used, including Si(100), fluorine-doped SnO2 (FTO), and CdS, and different growth conditions were applied. The texture behaviors of each sample were evaluated based on its XRD spectrum and are found to be dependent on both the substrate and the growth conditions. The texture strength is found to be, in order, Si(100) > FTO > CdS at a substrate temperature of 763 K under 100 Pa Ar, which is the opposite of the order of the surface roughness of the substrates. The textures of the films on FTO and chemical bath deposition (CBD)-CdS substrates, especially on CBD-CdS, are very sensitive to the growth conditions, whereas those on Si(100) are not. It is found that the texture is strengthened at elevated temperatures and suppressed under decreased ambient pressure. It is also found that the textured films are composed of both (111) and (511) texture components, which is believed to be the result of the twinning in (111) oriented grains.
AB - The texture of CdTe films deposited via close-spaced sublimation (CSS) was studied. Different substrates were used, including Si(100), fluorine-doped SnO2 (FTO), and CdS, and different growth conditions were applied. The texture behaviors of each sample were evaluated based on its XRD spectrum and are found to be dependent on both the substrate and the growth conditions. The texture strength is found to be, in order, Si(100) > FTO > CdS at a substrate temperature of 763 K under 100 Pa Ar, which is the opposite of the order of the surface roughness of the substrates. The textures of the films on FTO and chemical bath deposition (CBD)-CdS substrates, especially on CBD-CdS, are very sensitive to the growth conditions, whereas those on Si(100) are not. It is found that the texture is strengthened at elevated temperatures and suppressed under decreased ambient pressure. It is also found that the textured films are composed of both (111) and (511) texture components, which is believed to be the result of the twinning in (111) oriented grains.
UR - http://www.scopus.com/inward/record.url?scp=80052407120&partnerID=8YFLogxK
U2 - 10.1116/1.3610177
DO - 10.1116/1.3610177
M3 - 文章
AN - SCOPUS:80052407120
SN - 0734-2101
VL - 29
JO - Journal of Vacuum Science and Technology, Part A: Vacuum, Surfaces and Films
JF - Journal of Vacuum Science and Technology, Part A: Vacuum, Surfaces and Films
IS - 5
M1 - 051507
ER -