Abstract
The effects of crystal-liquid interface energy and undercooling on a crystal-liquid interface structure and the growth mode of undercooled semiconductors have been investigated. A factor to predict the structure of the solid-liquid interface has been identified. Criterions expressed as the critical nucleation undercoolings (ΔT*1 and ΔT*2) and kinetic undercoolings (ΔT*K1 and ΔT*K2) to judge the transition of growth mode in undercooled semiconductor have been developed. The growth mode of a semiconductor is a lateral one when nucleation undercooling is lower than ΔT*1 or kinetic undercooling is lower than ΔT*K1, a continuous one when nucleation undercooling is higher than ΔT*2 or kinetic undercooling is higher than ΔT*K2, and an intermediary one in the nucleation undercooling region from ΔT*1 to ΔT*2 or kinetic undercooling region from ΔT*K1 to ΔT*K2. The critical undercoolings for the growth transition predicted from the present criterions for silicon and germanium are in very good agreement with the experimentally measured results.
| Original language | English |
|---|---|
| Pages (from-to) | 3323-3333 |
| Number of pages | 11 |
| Journal | Acta Materialia |
| Volume | 52 |
| Issue number | 11 |
| DOIs | |
| State | Published - 21 Jun 2004 |
Keywords
- Continuous growth
- Germanium
- Lateral growth
- Silicon
- Undercooling
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