@inproceedings{77758e473b9c4651b8baaacc38a82d6d,
title = "Comparative study of different output metrics for a three weakly coupled resonator sensor",
abstract = "This paper, for the first time, investigates the characteristics of different output metrics for a three degreeof- freedom (DoF) coupled resonator sensor. The main aspects examined are sensitivity and linear range. It is shown from theoretical estimations, equivalent RLC circuit model simulations and electrical measurements that using the vibration amplitude ratio as an output signal provides improved sensitivity and linearity range, compared to other methods such as shift in eigenstate, mode frequency or amplitude difference.",
keywords = "linear range, linear sensitivity, MEMS coupled resonator sensor, output metrics",
author = "C. Zhao and Wood, {G. S.} and J. Xie and H. Chang and Pu, {S. H.} and M. Kraft",
note = "Publisher Copyright: {\textcopyright} 2015 IEEE.; 18th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS 2015 ; Conference date: 21-06-2015 Through 25-06-2015",
year = "2015",
month = aug,
day = "5",
doi = "10.1109/TRANSDUCERS.2015.7181396",
language = "英语",
series = "2015 Transducers - 2015 18th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS 2015",
publisher = "Institute of Electrical and Electronics Engineers Inc.",
pages = "2196--2199",
booktitle = "2015 Transducers - 2015 18th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS 2015",
}