Comparative study of different output metrics for a three weakly coupled resonator sensor

C. Zhao, G. S. Wood, J. Xie, H. Chang, S. H. Pu, M. Kraft

Research output: Chapter in Book/Report/Conference proceedingConference contributionpeer-review

15 Scopus citations

Abstract

This paper, for the first time, investigates the characteristics of different output metrics for a three degreeof- freedom (DoF) coupled resonator sensor. The main aspects examined are sensitivity and linear range. It is shown from theoretical estimations, equivalent RLC circuit model simulations and electrical measurements that using the vibration amplitude ratio as an output signal provides improved sensitivity and linearity range, compared to other methods such as shift in eigenstate, mode frequency or amplitude difference.

Original languageEnglish
Title of host publication2015 Transducers - 2015 18th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS 2015
PublisherInstitute of Electrical and Electronics Engineers Inc.
Pages2196-2199
Number of pages4
ISBN (Electronic)9781479989553
DOIs
StatePublished - 5 Aug 2015
Event18th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS 2015 - Anchorage, United States
Duration: 21 Jun 201525 Jun 2015

Publication series

Name2015 Transducers - 2015 18th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS 2015

Conference

Conference18th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS 2015
Country/TerritoryUnited States
CityAnchorage
Period21/06/1525/06/15

Keywords

  • linear range
  • linear sensitivity
  • MEMS coupled resonator sensor
  • output metrics

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