Combined processing strategy based on magnetorheological finishing for monocrystalline silicon x-ray mirrors

Shiwei Liu; Hongxiang Wang; Jing Hou; Qinghua Zhang; Xianhua Chen; Bo Zhong; Mingzhuang Zhang

doi:10.1364/AO.459076

Combined processing strategy based on magnetorheological finishing for monocrystalline silicon x-ray mirrors

Shiwei Liu, Hongxiang Wang, Jing Hou, Qinghua Zhang, Xianhua Chen, Bo Zhong, Mingzhuang Zhang

Research output: Contribution to journal › Article › peer-review

6 Scopus citations

Abstract

Higher requirements for monocrystalline silicon x-ray mirrors have been put forward with the development of synchrotron radiation optics. The existing processing technologies limit their efficiency while achieving high-precision manufacturing of x-ray mirrors. Hence, this paper formulates a processing strategy of employing magnetorheological finishing (MRF) to make the precision of x-ray mirrors fully meet the standard. The combination of fine polishing and super-smooth processing can effectively improve the surface quality of mirrors. The residual error, wavefront gradient, and surface roughness of the mirror can reach 7.2 nm, 0.42 µrad, and 0.28 nm, respectively, after several iterations. The research not only indicates that MRF can replace the existing manufacturing method and greatly improve processing efficiency, but also provides technical support for optimizing the processing route of x-ray mirrors.

Original language	English
Pages (from-to)	5575-5584
Number of pages	10
Journal	Applied Optics
Volume	61
Issue number	19
DOIs	https://doi.org/10.1364/AO.459076
State	Published - 1 Jul 2022
Externally published	Yes

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title = "Combined processing strategy based on magnetorheological finishing for monocrystalline silicon x-ray mirrors",

abstract = "Higher requirements for monocrystalline silicon x-ray mirrors have been put forward with the development of synchrotron radiation optics. The existing processing technologies limit their efficiency while achieving high-precision manufacturing of x-ray mirrors. Hence, this paper formulates a processing strategy of employing magnetorheological finishing (MRF) to make the precision of x-ray mirrors fully meet the standard. The combination of fine polishing and super-smooth processing can effectively improve the surface quality of mirrors. The residual error, wavefront gradient, and surface roughness of the mirror can reach 7.2 nm, 0.42 µrad, and 0.28 nm, respectively, after several iterations. The research not only indicates that MRF can replace the existing manufacturing method and greatly improve processing efficiency, but also provides technical support for optimizing the processing route of x-ray mirrors.",

author = "Shiwei Liu and Hongxiang Wang and Jing Hou and Qinghua Zhang and Xianhua Chen and Bo Zhong and Mingzhuang Zhang",

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T1 - Combined processing strategy based on magnetorheological finishing for monocrystalline silicon x-ray mirrors

AU - Liu, Shiwei

AU - Wang, Hongxiang

AU - Hou, Jing

AU - Zhang, Qinghua

AU - Chen, Xianhua

AU - Zhong, Bo

AU - Zhang, Mingzhuang

PY - 2022/7/1

Y1 - 2022/7/1

N2 - Higher requirements for monocrystalline silicon x-ray mirrors have been put forward with the development of synchrotron radiation optics. The existing processing technologies limit their efficiency while achieving high-precision manufacturing of x-ray mirrors. Hence, this paper formulates a processing strategy of employing magnetorheological finishing (MRF) to make the precision of x-ray mirrors fully meet the standard. The combination of fine polishing and super-smooth processing can effectively improve the surface quality of mirrors. The residual error, wavefront gradient, and surface roughness of the mirror can reach 7.2 nm, 0.42 µrad, and 0.28 nm, respectively, after several iterations. The research not only indicates that MRF can replace the existing manufacturing method and greatly improve processing efficiency, but also provides technical support for optimizing the processing route of x-ray mirrors.

AB - Higher requirements for monocrystalline silicon x-ray mirrors have been put forward with the development of synchrotron radiation optics. The existing processing technologies limit their efficiency while achieving high-precision manufacturing of x-ray mirrors. Hence, this paper formulates a processing strategy of employing magnetorheological finishing (MRF) to make the precision of x-ray mirrors fully meet the standard. The combination of fine polishing and super-smooth processing can effectively improve the surface quality of mirrors. The residual error, wavefront gradient, and surface roughness of the mirror can reach 7.2 nm, 0.42 µrad, and 0.28 nm, respectively, after several iterations. The research not only indicates that MRF can replace the existing manufacturing method and greatly improve processing efficiency, but also provides technical support for optimizing the processing route of x-ray mirrors.

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Combined processing strategy based on magnetorheological finishing for monocrystalline silicon x-ray mirrors

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