TY - JOUR
T1 - Calculation and synthesis of ZrC by CVD from ZrCl 4 -C 3 H 6 -H 2 -Ar system with high H 2 percentage
AU - Zhu, Yan
AU - Cheng, Laifei
AU - Ma, Baisheng
AU - Gao, Shuang
AU - Feng, Wei
AU - Liu, Yongsheng
AU - Zhang, Litong
N1 - Publisher Copyright:
© 2015 Elsevier B.V. All rights reserved.
PY - 2015/3/30
Y1 - 2015/3/30
N2 - A thermodynamic calculation about the synthesis of ZrC from the ZrCl 4 -C 3 H 6 -H 2 -Ar system with high percentage of H 2 was performed using the FactSage thermochemical software. According to the calculation, ZrC coating was synthesized on graphite substrates and carbon fibers by a low pressure chemical vapor deposition (LPCVD) process, and growth rate of the ZrC coating as a function of temperature was investigated. The surface diagrams of condensed-phases in this system were expressed as the functions of the deposition temperature, total pressure and reactant ratios of ZrCl 4 /(ZrCl 4 + C 3 H 6 ), H 2 /(ZrCl 4 + C 3 H 6 ), and the yield of the products was determined by the diagrams. A smooth and dense ZrC coating could be synthesized under the instruction of the calculated parameters. The morphologies of the ZrC coatings were significantly affected by temperature and gases flux. The deposition temperature is much lower than that from the ZrCl 4 -CH 4 -H 2 -Ar system.
AB - A thermodynamic calculation about the synthesis of ZrC from the ZrCl 4 -C 3 H 6 -H 2 -Ar system with high percentage of H 2 was performed using the FactSage thermochemical software. According to the calculation, ZrC coating was synthesized on graphite substrates and carbon fibers by a low pressure chemical vapor deposition (LPCVD) process, and growth rate of the ZrC coating as a function of temperature was investigated. The surface diagrams of condensed-phases in this system were expressed as the functions of the deposition temperature, total pressure and reactant ratios of ZrCl 4 /(ZrCl 4 + C 3 H 6 ), H 2 /(ZrCl 4 + C 3 H 6 ), and the yield of the products was determined by the diagrams. A smooth and dense ZrC coating could be synthesized under the instruction of the calculated parameters. The morphologies of the ZrC coatings were significantly affected by temperature and gases flux. The deposition temperature is much lower than that from the ZrCl 4 -CH 4 -H 2 -Ar system.
KW - Chemical vapor deposition
KW - Synthesis experiments
KW - Thermodynamic calculation
KW - Zirconium carbide
UR - http://www.scopus.com/inward/record.url?scp=84924115117&partnerID=8YFLogxK
U2 - 10.1016/j.apsusc.2015.01.175
DO - 10.1016/j.apsusc.2015.01.175
M3 - 文章
AN - SCOPUS:84924115117
SN - 0169-4332
VL - 332
SP - 591
EP - 598
JO - Applied Surface Science
JF - Applied Surface Science
ER -