A virtual gyroscope based-on a single-chip four-microgyroscope array

Qiang Shen; Weizheng Yuan; Beini Qu; Jianbin Xie; Honglong Chang

doi:10.1109/NEMS.2014.6908789

A virtual gyroscope based-on a single-chip four-microgyroscope array

Qiang Shen
, Weizheng Yuan
, Beini Qu
, Jianbin Xie
, Honglong Chang

School of Mechanical Engineering

Northwestern Polytechnical University Xian

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › peer-review

9 Scopus citations

Abstract

This paper establishes a virtual gyroscope based on a single-chip four-microgyroscope array. The four gyroscope array is integrated to a small area on a single chip by a silicon-on-insulator (SOI) process. As far as we know, this is the first reported virtual gyroscope system based on a single-chip gyroscope array. Test results show that scale factor of four single gyroscopes are 6.9mV/deg/s, 7.5mV/deg/s, 8.1mV/deg/s and 10.2mV/deg/s, respectively. The bias stability of the virtual gyroscope I maximumly improved from 0.042deg/s to 0.013deg/s, which is a 3.2 times improvement.

Original language	English
Title of host publication	9th IEEE International Conference on Nano/Micro Engineered and Molecular Systems, IEEE-NEMS 2014
Publisher	Institute of Electrical and Electronics Engineers Inc.
Pages	195-198
Number of pages	4
ISBN (Electronic)	9781479947270
DOIs	https://doi.org/10.1109/NEMS.2014.6908789
State	Published - 23 Sep 2014
Event	9th IEEE International Conference on Nano/Micro Engineered and Molecular Systems, IEEE-NEMS 2014 - Waikiki Beach, United States Duration: 13 Apr 2014 → 16 Apr 2014

Publication series

Name	9th IEEE International Conference on Nano/Micro Engineered and Molecular Systems, IEEE-NEMS 2014

Conference

Conference	9th IEEE International Conference on Nano/Micro Engineered and Molecular Systems, IEEE-NEMS 2014
Country/Territory	United States
City	Waikiki Beach
Period	13/04/14 → 16/04/14

Keywords

Four-microgyroscope array
Single chip
Virtual gyroscope

Access to Document

10.1109/NEMS.2014.6908789

Cite this

Shen, Q., Yuan, W., Qu, B., Xie, J., & Chang, H. (2014). A virtual gyroscope based-on a single-chip four-microgyroscope array. In 9th IEEE International Conference on Nano/Micro Engineered and Molecular Systems, IEEE-NEMS 2014 (pp. 195-198). Article 6908789 (9th IEEE International Conference on Nano/Micro Engineered and Molecular Systems, IEEE-NEMS 2014). Institute of Electrical and Electronics Engineers Inc.. https://doi.org/10.1109/NEMS.2014.6908789

Shen, Qiang ; Yuan, Weizheng ; Qu, Beini et al. / A virtual gyroscope based-on a single-chip four-microgyroscope array. 9th IEEE International Conference on Nano/Micro Engineered and Molecular Systems, IEEE-NEMS 2014. Institute of Electrical and Electronics Engineers Inc., 2014. pp. 195-198 (9th IEEE International Conference on Nano/Micro Engineered and Molecular Systems, IEEE-NEMS 2014).

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title = "A virtual gyroscope based-on a single-chip four-microgyroscope array",

abstract = "This paper establishes a virtual gyroscope based on a single-chip four-microgyroscope array. The four gyroscope array is integrated to a small area on a single chip by a silicon-on-insulator (SOI) process. As far as we know, this is the first reported virtual gyroscope system based on a single-chip gyroscope array. Test results show that scale factor of four single gyroscopes are 6.9mV/deg/s, 7.5mV/deg/s, 8.1mV/deg/s and 10.2mV/deg/s, respectively. The bias stability of the virtual gyroscope I maximumly improved from 0.042deg/s to 0.013deg/s, which is a 3.2 times improvement.",

keywords = "Four-microgyroscope array, Single chip, Virtual gyroscope",

author = "Qiang Shen and Weizheng Yuan and Beini Qu and Jianbin Xie and Honglong Chang",

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doi = "10.1109/NEMS.2014.6908789",

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series = "9th IEEE International Conference on Nano/Micro Engineered and Molecular Systems, IEEE-NEMS 2014",

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Shen, Q, Yuan, W, Qu, B, Xie, J & Chang, H 2014, A virtual gyroscope based-on a single-chip four-microgyroscope array. in 9th IEEE International Conference on Nano/Micro Engineered and Molecular Systems, IEEE-NEMS 2014., 6908789, 9th IEEE International Conference on Nano/Micro Engineered and Molecular Systems, IEEE-NEMS 2014, Institute of Electrical and Electronics Engineers Inc., pp. 195-198, 9th IEEE International Conference on Nano/Micro Engineered and Molecular Systems, IEEE-NEMS 2014, Waikiki Beach, United States, 13/04/14. https://doi.org/10.1109/NEMS.2014.6908789

A virtual gyroscope based-on a single-chip four-microgyroscope array. / Shen, Qiang; Yuan, Weizheng; Qu, Beini et al.
9th IEEE International Conference on Nano/Micro Engineered and Molecular Systems, IEEE-NEMS 2014. Institute of Electrical and Electronics Engineers Inc., 2014. p. 195-198 6908789 (9th IEEE International Conference on Nano/Micro Engineered and Molecular Systems, IEEE-NEMS 2014).

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › peer-review

TY - GEN

T1 - A virtual gyroscope based-on a single-chip four-microgyroscope array

AU - Shen, Qiang

AU - Yuan, Weizheng

AU - Qu, Beini

AU - Xie, Jianbin

AU - Chang, Honglong

PY - 2014/9/23

Y1 - 2014/9/23

N2 - This paper establishes a virtual gyroscope based on a single-chip four-microgyroscope array. The four gyroscope array is integrated to a small area on a single chip by a silicon-on-insulator (SOI) process. As far as we know, this is the first reported virtual gyroscope system based on a single-chip gyroscope array. Test results show that scale factor of four single gyroscopes are 6.9mV/deg/s, 7.5mV/deg/s, 8.1mV/deg/s and 10.2mV/deg/s, respectively. The bias stability of the virtual gyroscope I maximumly improved from 0.042deg/s to 0.013deg/s, which is a 3.2 times improvement.

AB - This paper establishes a virtual gyroscope based on a single-chip four-microgyroscope array. The four gyroscope array is integrated to a small area on a single chip by a silicon-on-insulator (SOI) process. As far as we know, this is the first reported virtual gyroscope system based on a single-chip gyroscope array. Test results show that scale factor of four single gyroscopes are 6.9mV/deg/s, 7.5mV/deg/s, 8.1mV/deg/s and 10.2mV/deg/s, respectively. The bias stability of the virtual gyroscope I maximumly improved from 0.042deg/s to 0.013deg/s, which is a 3.2 times improvement.

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KW - Single chip

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BT - 9th IEEE International Conference on Nano/Micro Engineered and Molecular Systems, IEEE-NEMS 2014

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Shen Q, Yuan W, Qu B, Xie J, Chang H. A virtual gyroscope based-on a single-chip four-microgyroscope array. In 9th IEEE International Conference on Nano/Micro Engineered and Molecular Systems, IEEE-NEMS 2014. Institute of Electrical and Electronics Engineers Inc. 2014. p. 195-198. 6908789. (9th IEEE International Conference on Nano/Micro Engineered and Molecular Systems, IEEE-NEMS 2014). doi: 10.1109/NEMS.2014.6908789

A virtual gyroscope based-on a single-chip four-microgyroscope array

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