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A three-dimensional electrostatic/electret micro power generator for low acceleration and low frequency vibration energy harvesting

  • K. Tao
  • , S. W. Liu
  • , J. M. Miao
  • , S. W. Lye
  • Nanyang Technological University

Research output: Chapter in Book/Report/Conference proceedingConference contributionpeer-review

7 Scopus citations

Abstract

This paper presents the fabrication and characterization of a novel three-dimensional (3D) electret-based micro power generator, which is capable of converting low acceleration (<0.05g) and low frequency (<100Hz) ambient kinetic energy to electrical energy. A localized charging method integrating multiple needles is proposed. The experimental analysis shows that the proposed generator operates an out-of-plane direction at mode I of 66Hz and two in-plane directions at mode II of 75Hz and mode III of 78.5Hz with a phase difference of about 90°. It can be a potential candidate in the development of a 3D vibration energy harvester.

Original languageEnglish
Title of host publicationMEMS 2014 - 27th IEEE International Conference on Micro Electro Mechanical Systems
PublisherInstitute of Electrical and Electronics Engineers Inc.
Pages366-369
Number of pages4
ISBN (Print)9781479935086
DOIs
StatePublished - 2014
Externally publishedYes
Event27th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2014 - San Francisco, CA, United States
Duration: 26 Jan 201430 Jan 2014

Publication series

NameProceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)
ISSN (Print)1084-6999

Conference

Conference27th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2014
Country/TerritoryUnited States
CitySan Francisco, CA
Period26/01/1430/01/14

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