A Silicon Recording Probe with Integrated Ag/Agcl Reference Electrode for In-Situ PH Sensing

Longchun Wang, Zhejun Guo, Bowen Ji, Ye Xi, Bin Yang, Jingquan Liu

Research output: Chapter in Book/Report/Conference proceedingConference contributionpeer-review

1 Scopus citations

Abstract

This paper presents a silicon recording probe with integrated in-situ Ag/AgCl reference electrode (ISA/ARE) for simultaneous pH sensing and electrophysiology recordings for the application neuroscience. The preparation of in-situ silver layer and its chlorination are realized by a constant current electrochemical plating method. The repeatable Ag/AgCl layer with stable potential has been verified by X-ray diffraction and electrochemical measurements. Meanwhile, the pH sensitivity of the combination of Iridium oxide (IrOx) electrodes and ISA/ARE is 54.7mV/pH. The area of ISA/ARE is only 7000m2, which is highly compatible with the preparation process of silicon probes, and is suitable for integration into the front of micro shanks as an in-situ detection reference. In short, the unique fabrication method to realize miniaturized and integrated in-situ reference electrode is of great significance to biosensors.

Original languageEnglish
Title of host publication21st International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS 2021
PublisherInstitute of Electrical and Electronics Engineers Inc.
Pages1412-1415
Number of pages4
ISBN (Electronic)9781665412674
DOIs
StatePublished - 20 Jun 2021
Event21st International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS 2021 - Virtual, Online, United States
Duration: 20 Jun 202125 Jun 2021

Publication series

Name21st International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS 2021

Conference

Conference21st International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS 2021
Country/TerritoryUnited States
CityVirtual, Online
Period20/06/2125/06/21

Keywords

  • Ag/AgCl
  • In-situ reference electrode
  • Neural probe
  • pH sensing

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