A sensor for stiffness change sensing based on three weakly coupled resonators with enhanced sensitivity

Chun Zhao; Graham S. Wood; Jianbing Xie; Honglong Chang; Suan Hui Pu; Harold M.H. Chong; Michael Kraft

doi:10.1109/MEMSYS.2015.7051100

A sensor for stiffness change sensing based on three weakly coupled resonators with enhanced sensitivity

Chun Zhao, Graham S. Wood, Jianbing Xie, Honglong Chang, Suan Hui Pu, Harold M.H. Chong, Michael Kraft

School of Mechanical Engineering

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › peer-review

30 Scopus citations

Abstract

This paper reports on a novel MEMS resonant sensing device consisting of three weakly coupled resonators that can achieve an order of magnitude improvement in sensitivity to stiffness change, compared to current state-of-the-art resonator sensors with similar size and resonant frequency. In a 3 degree-of-freedom (DoF) system, if an external stimulus causes change in the spring stiffness of one resonator, mode localization occurs, leading to a drastic change of mode shape, which can be detected by measuring the modal amplitude ratio change. A 49 times improvement in sensitivity compared to a previously reported 2DoF resonator sensor, and 4 orders of magnitude enhancement compared to a 1DoF resonator sensor has been achieved.

Original language	English
Title of host publication	2015 28th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2015
Publisher	Institute of Electrical and Electronics Engineers Inc.
Pages	881-884
Number of pages	4
Edition	February
ISBN (Electronic)	9781479979554
DOIs	https://doi.org/10.1109/MEMSYS.2015.7051100
State	Published - 26 Feb 2015
Event	2015 28th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2015 - Estoril, Portugal Duration: 18 Jan 2015 → 22 Jan 2015

Publication series

Name	Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)
Number	February
Volume	2015-February
ISSN (Print)	1084-6999

Conference

Conference	2015 28th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2015
Country/Territory	Portugal
City	Estoril
Period	18/01/15 → 22/01/15

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10.1109/MEMSYS.2015.7051100

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Zhao, C., Wood, G. S., Xie, J., Chang, H., Pu, S. H., Chong, H. M. H., & Kraft, M. (2015). A sensor for stiffness change sensing based on three weakly coupled resonators with enhanced sensitivity. In 2015 28th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2015 (February ed., pp. 881-884). Article 7051100 (Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS); Vol. 2015-February, No. February). Institute of Electrical and Electronics Engineers Inc.. https://doi.org/10.1109/MEMSYS.2015.7051100

Zhao, Chun ; Wood, Graham S. ; Xie, Jianbing et al. / A sensor for stiffness change sensing based on three weakly coupled resonators with enhanced sensitivity. 2015 28th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2015. February. ed. Institute of Electrical and Electronics Engineers Inc., 2015. pp. 881-884 (Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS); February).

@inproceedings{bbd187a4dd5f4aadbf55c0a1b25741d8,

title = "A sensor for stiffness change sensing based on three weakly coupled resonators with enhanced sensitivity",

abstract = "This paper reports on a novel MEMS resonant sensing device consisting of three weakly coupled resonators that can achieve an order of magnitude improvement in sensitivity to stiffness change, compared to current state-of-the-art resonator sensors with similar size and resonant frequency. In a 3 degree-of-freedom (DoF) system, if an external stimulus causes change in the spring stiffness of one resonator, mode localization occurs, leading to a drastic change of mode shape, which can be detected by measuring the modal amplitude ratio change. A 49 times improvement in sensitivity compared to a previously reported 2DoF resonator sensor, and 4 orders of magnitude enhancement compared to a 1DoF resonator sensor has been achieved.",

author = "Chun Zhao and Wood, {Graham S.} and Jianbing Xie and Honglong Chang and Pu, {Suan Hui} and Chong, {Harold M.H.} and Michael Kraft",

note = "Publisher Copyright: {\textcopyright} 2015 IEEE.; 2015 28th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2015 ; Conference date: 18-01-2015 Through 22-01-2015",

year = "2015",

month = feb,

day = "26",

doi = "10.1109/MEMSYS.2015.7051100",

language = "英语",

series = "Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)",

publisher = "Institute of Electrical and Electronics Engineers Inc.",

number = "February",

pages = "881--884",

booktitle = "2015 28th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2015",

edition = "February",

}

Zhao, C, Wood, GS, Xie, J, Chang, H, Pu, SH, Chong, HMH & Kraft, M 2015, A sensor for stiffness change sensing based on three weakly coupled resonators with enhanced sensitivity. in 2015 28th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2015. February edn, 7051100, Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS), no. February, vol. 2015-February, Institute of Electrical and Electronics Engineers Inc., pp. 881-884, 2015 28th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2015, Estoril, Portugal, 18/01/15. https://doi.org/10.1109/MEMSYS.2015.7051100

A sensor for stiffness change sensing based on three weakly coupled resonators with enhanced sensitivity. / Zhao, Chun; Wood, Graham S.; Xie, Jianbing et al.
2015 28th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2015. February. ed. Institute of Electrical and Electronics Engineers Inc., 2015. p. 881-884 7051100 (Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS); Vol. 2015-February, No. February).

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › peer-review

TY - GEN

T1 - A sensor for stiffness change sensing based on three weakly coupled resonators with enhanced sensitivity

AU - Zhao, Chun

AU - Wood, Graham S.

AU - Xie, Jianbing

AU - Chang, Honglong

AU - Pu, Suan Hui

AU - Chong, Harold M.H.

AU - Kraft, Michael

PY - 2015/2/26

Y1 - 2015/2/26

N2 - This paper reports on a novel MEMS resonant sensing device consisting of three weakly coupled resonators that can achieve an order of magnitude improvement in sensitivity to stiffness change, compared to current state-of-the-art resonator sensors with similar size and resonant frequency. In a 3 degree-of-freedom (DoF) system, if an external stimulus causes change in the spring stiffness of one resonator, mode localization occurs, leading to a drastic change of mode shape, which can be detected by measuring the modal amplitude ratio change. A 49 times improvement in sensitivity compared to a previously reported 2DoF resonator sensor, and 4 orders of magnitude enhancement compared to a 1DoF resonator sensor has been achieved.

AB - This paper reports on a novel MEMS resonant sensing device consisting of three weakly coupled resonators that can achieve an order of magnitude improvement in sensitivity to stiffness change, compared to current state-of-the-art resonator sensors with similar size and resonant frequency. In a 3 degree-of-freedom (DoF) system, if an external stimulus causes change in the spring stiffness of one resonator, mode localization occurs, leading to a drastic change of mode shape, which can be detected by measuring the modal amplitude ratio change. A 49 times improvement in sensitivity compared to a previously reported 2DoF resonator sensor, and 4 orders of magnitude enhancement compared to a 1DoF resonator sensor has been achieved.

UR - http://www.scopus.com/inward/record.url?scp=84931065208&partnerID=8YFLogxK

U2 - 10.1109/MEMSYS.2015.7051100

DO - 10.1109/MEMSYS.2015.7051100

M3 - 会议稿件

AN - SCOPUS:84931065208

T3 - Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)

SP - 881

EP - 884

BT - 2015 28th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2015

PB - Institute of Electrical and Electronics Engineers Inc.

T2 - 2015 28th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2015

Y2 - 18 January 2015 through 22 January 2015

ER -

Zhao C, Wood GS, Xie J, Chang H, Pu SH, Chong HMH et al. A sensor for stiffness change sensing based on three weakly coupled resonators with enhanced sensitivity. In 2015 28th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2015. February ed. Institute of Electrical and Electronics Engineers Inc. 2015. p. 881-884. 7051100. (Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS); February). doi: 10.1109/MEMSYS.2015.7051100

A sensor for stiffness change sensing based on three weakly coupled resonators with enhanced sensitivity

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