A Pressure Sensor Based on Soi Achieved Accurate Pressure Measurement Within the Range of 20 to 300° C after Temperature Compensation

The accurate measurement of pressure on the surface of high-speed flying aircraft in a high-temperature environment is of vital importance to the aerodynamic design of the aircraft. A manufacturing technology for hightemperature pressure sensors based on heavily doped silicon-on-insulator (SOI) wafers has been proposed. Combined with a temperature compensation algorithm, the sensor is able to accurately measure pressures ranging from 0 to 350 kPa within the temperature range of 20 to 300° C. The test results show that at 300° C, the sensitivity, nonlinear error, repeatability, and hysteresis of the sensor are 0.246mV/kPa, 0.245%FSO, 0.390% FSO, and 0.628% FSO respectively. The thermal zero shift is 0.2004mV/°C and the thermal sensitivity shift is 0.38μV/kPa/°C from 20300°C. After temperature compensation, the pressure measurement error of the sensor in the full temperature range can be reached to ± 1.85% FSO. This work provides a solution for fabricating high-precision pressure sensors with a wide temperature range.