A new microprogrammable grating and its potential application

Based on the microelectromechanical systems (MEMS) technology, a new microprogrammable grating with its blazed angle electrostatically modulated was developed using a two-layer polysilicon surface micromachining process, which has a simple structure and a large tunable capability in its blazed angle. A pull-in voltage of 110~115 V, restoring voltage of 74~65 V, resonant frequency of ~78 kHz, adjusting time of ~12 μs, and maximum operational blazed angle of more than 5° were achieved. The measured results are basically consistent with the simulation. The possibility of using the new microprogrammable grating as an optical switch was discussed in detail. And a few recommendations were proposed for such application considering the existing problems of the grating.