A Mode-Localized Magnetometer with Resolution of 6.9 NT/√ Hz Within the Range of 100 mT

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Abstract

This paper reports a mode-localized magnetometer with novel 3 degrees-of-freedom (DOF) weakly coupled resonators (WCRs) coupled by F-shaped coupling beams. In this coupling mechanism, the direct coupling between the two outer resonators can be effectively suppressed, which decreases the coupling coefficient and drastically increases the sensitivity. Utilizing these novel WCRs for Lorentz force sensing, a magnetometer is realized with the resolution of 6.9 text{nT}/surd text{Hz} in the range of 100 mT, which is an improvement of 234.78 times that of state-of-the-art mode-localized magnetometers (1.62 mu mathrm{T}/surdtext{Hz}).

Original languageEnglish
Title of host publication33rd IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2020
PublisherInstitute of Electrical and Electronics Engineers Inc.
Pages190-193
Number of pages4
ISBN (Electronic)9781728135809
DOIs
StatePublished - Jan 2020
Event33rd IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2020 - Vancouver, Canada
Duration: 18 Jan 202022 Jan 2020

Publication series

NameProceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)
Volume2020-January
ISSN (Print)1084-6999

Conference

Conference33rd IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2020
Country/TerritoryCanada
CityVancouver
Period18/01/2022/01/20

Keywords

  • Lorentz force
  • Magnetometer
  • mode-localization
  • weakly coupled resonators

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